Enhancement of properties of magnetron sputtered Cu films by Zr addition

Kód výsledku v IS VaVaI

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Nalezeny alternativní kódy

RIV/49777513:23520/23:43969443

Výsledek na webu

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DOI - Digital Object Identifier

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Jazyk výsledku

angličtina

Název v původním jazyce

Enhancement of properties of magnetron sputtered Cu films by Zr addition

Popis výsledku v původním jazyce

Nano- and microcrystalline Cu-Zr alloys produced using different techniques exhibit high strength and thermal stability. Under certain technological conditions, Zr can form supersaturated solutions in the Cu crystal lattice, two-phase structures with intermetallic particles, and can segregate at the grain boundaries. However, the regularities of the equilibrium grain boundary segregation process and the nature of the alloying element distribution in the volume of the base metal have not been studied sufficiently and require further investigation. In this regard, this study aims to prepare binary Cu-Zr thin-film alloys by magnetron sputtering of Cu and Zr from two separate targets and to study the effect of the Zr content on the structure, phase composition, and properties of these films.A series of films obtained under the same deposition conditions in the range of Zr contents from ⁓ 1.0 to 4.4 at. % was examined by X-ray diffraction, scanning electron microscopy, atomic force microscopy, and nanoindentation. It was found that the alloying of Cu films with Zr leads to a significant change in the structure and properties of the studied materials. All investigated films are characterized by an fcc lattice with a strong &lt;111&gt; texture perpendicular to the surface, the degree of which depends non-monotonically on the Zr content reaching a maximum at ⁓ 1.8 at. % Zr. With increasing Zr content, an increase in the lattice parameter of the films, indicating the formation of a supersaturated solid solution, and a decrease in the size of the coherently diffracted domains were also detected. In addition, the formation of an isotropic granular structure and the appearance of an intermetallic phase were observed at the highest Zr content of 4.4 at. %. The observed evolution of the structure leads to an almost twofold increase in hardness compared to a single-component Cu film, which exceeds even the values for analogous two-component Cu-Zr films reported in the literature.

Název v anglickém jazyce

Enhancement of properties of magnetron sputtered Cu films by Zr addition

Popis výsledku anglicky

Nano- and microcrystalline Cu-Zr alloys produced using different techniques exhibit high strength and thermal stability. Under certain technological conditions, Zr can form supersaturated solutions in the Cu crystal lattice, two-phase structures with intermetallic particles, and can segregate at the grain boundaries. However, the regularities of the equilibrium grain boundary segregation process and the nature of the alloying element distribution in the volume of the base metal have not been studied sufficiently and require further investigation. In this regard, this study aims to prepare binary Cu-Zr thin-film alloys by magnetron sputtering of Cu and Zr from two separate targets and to study the effect of the Zr content on the structure, phase composition, and properties of these films.A series of films obtained under the same deposition conditions in the range of Zr contents from ⁓ 1.0 to 4.4 at. % was examined by X-ray diffraction, scanning electron microscopy, atomic force microscopy, and nanoindentation. It was found that the alloying of Cu films with Zr leads to a significant change in the structure and properties of the studied materials. All investigated films are characterized by an fcc lattice with a strong &lt;111&gt; texture perpendicular to the surface, the degree of which depends non-monotonically on the Zr content reaching a maximum at ⁓ 1.8 at. % Zr. With increasing Zr content, an increase in the lattice parameter of the films, indicating the formation of a supersaturated solid solution, and a decrease in the size of the coherently diffracted domains were also detected. In addition, the formation of an isotropic granular structure and the appearance of an intermetallic phase were observed at the highest Zr content of 4.4 at. %. The observed evolution of the structure leads to an almost twofold increase in hardness compared to a single-component Cu film, which exceeds even the values for analogous two-component Cu-Zr films reported in the literature.

Druh

O - Ostatní výsledky

CEP obor

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OECD FORD obor

20506 - Coating and films

Projekt

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Návaznosti

S - Specificky vyzkum na vysokych skolach

Rok uplatnění

2023

Kód důvěrnosti údajů

S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů