On bipolar HiPIMS pulse configurations to enhance energy and ion flux to insulating substrates
Identifikátory výsledku
Kód výsledku v IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F49777513%3A23520%2F24%3A43973133" target="_blank" >RIV/49777513:23520/24:43973133 - isvavai.cz</a>
Výsledek na webu
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DOI - Digital Object Identifier
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Alternativní jazyky
Jazyk výsledku
angličtina
Název v původním jazyce
On bipolar HiPIMS pulse configurations to enhance energy and ion flux to insulating substrates
Popis výsledku v původním jazyce
High-power impulse magnetron sputtering (HiPIMS) offers enhanced ionization for thin film deposition but struggles with low-energy ions. Bipolar HiPIMS, using alternating negative and positive pulses, presents a potential solution, especially for films on insulating substrates where surface charging is an issue. This study investigates optimizing bipolar HiPIMS pulse configurations, comparing unipolar and multi-pulse setups under different magnetic fields. Results show that bipolar HiPIMS introduces a high-energy ion peak, with the multi-pulse configuration broadening this peak and affecting film structure, despite a slight reduction in ion flux. Time-resolved measurements further highlight the evolution of energetic ion flux.
Název v anglickém jazyce
On bipolar HiPIMS pulse configurations to enhance energy and ion flux to insulating substrates
Popis výsledku anglicky
High-power impulse magnetron sputtering (HiPIMS) offers enhanced ionization for thin film deposition but struggles with low-energy ions. Bipolar HiPIMS, using alternating negative and positive pulses, presents a potential solution, especially for films on insulating substrates where surface charging is an issue. This study investigates optimizing bipolar HiPIMS pulse configurations, comparing unipolar and multi-pulse setups under different magnetic fields. Results show that bipolar HiPIMS introduces a high-energy ion peak, with the multi-pulse configuration broadening this peak and affecting film structure, despite a slight reduction in ion flux. Time-resolved measurements further highlight the evolution of energetic ion flux.
Klasifikace
Druh
O - Ostatní výsledky
CEP obor
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OECD FORD obor
10305 - Fluids and plasma physics (including surface physics)
Návaznosti výsledku
Projekt
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Návaznosti
S - Specificky vyzkum na vysokych skolach
Ostatní
Rok uplatnění
2024
Kód důvěrnosti údajů
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů