Extraordinary oxidation behavior of W–Zr thin-film metallic glasses: A route for tailoring functional properties of W–Zr–O films

Kód výsledku v IS VaVaI

<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F49777513%3A23520%2F25%3A43975328" target="_blank" >RIV/49777513:23520/25:43975328 - isvavai.cz</a>

Výsledek na webu

<a href="https://doi.org/10.1016/j.surfcoat.2025.132074" target="_blank" >https://doi.org/10.1016/j.surfcoat.2025.132074</a>

DOI - Digital Object Identifier

<a href="http://dx.doi.org/10.1016/j.surfcoat.2025.132074" target="_blank" >10.1016/j.surfcoat.2025.132074</a>

Jazyk výsledku

angličtina

Název v původním jazyce

Extraordinary oxidation behavior of W–Zr thin-film metallic glasses: A route for tailoring functional properties of W–Zr–O films

Popis výsledku v původním jazyce

The oxidation behavior of W–Zr thin-film metallic glasses (TFMGs) with 32, 48 and 61 at.% Zr, prepared by dc magnetron co-sputtering, was comprehensively studied after annealing in synthetic air. The study focuses on the effect of the annealing temperature (up to 600 °C) on the oxidation process, oxygen saturation, structure evolution, and their subsequent impact on electrical, optical and mechanical properties. The findings reveal that controlled oxidation transforms W–Zr TFMGs into amorphous ceramic W–Zr–O films with substoichiometric compositions. This is a consequence of an oxidation process that does not proceed through the formation of a stoichiometric oxide layer on the surface of W–Zr TFMGs, acting as a diffusion barrier against fast oxidation, but leads to a gradual incorporation of oxygen across the film volume due to thermodynamics factors. Higher Zr content accelerates the oxygen incorporation and its depth uniformity in films. As a result, the mechanical properties are significantly enhanced by achieving hardness values of up to 17.5 GPa at approximately 50 % oxygen saturation. Simultaneously, the electrical and optical properties are finely tuned with the resistivity and the extinction coefficient (measured at 550 nm) ranging from 1.7 to 95.7 × 10^−4 Ω·cm and 0.28 to 1.06, respectively.

Název v anglickém jazyce

Extraordinary oxidation behavior of W–Zr thin-film metallic glasses: A route for tailoring functional properties of W–Zr–O films

Popis výsledku anglicky

The oxidation behavior of W–Zr thin-film metallic glasses (TFMGs) with 32, 48 and 61 at.% Zr, prepared by dc magnetron co-sputtering, was comprehensively studied after annealing in synthetic air. The study focuses on the effect of the annealing temperature (up to 600 °C) on the oxidation process, oxygen saturation, structure evolution, and their subsequent impact on electrical, optical and mechanical properties. The findings reveal that controlled oxidation transforms W–Zr TFMGs into amorphous ceramic W–Zr–O films with substoichiometric compositions. This is a consequence of an oxidation process that does not proceed through the formation of a stoichiometric oxide layer on the surface of W–Zr TFMGs, acting as a diffusion barrier against fast oxidation, but leads to a gradual incorporation of oxygen across the film volume due to thermodynamics factors. Higher Zr content accelerates the oxygen incorporation and its depth uniformity in films. As a result, the mechanical properties are significantly enhanced by achieving hardness values of up to 17.5 GPa at approximately 50 % oxygen saturation. Simultaneously, the electrical and optical properties are finely tuned with the resistivity and the extinction coefficient (measured at 550 nm) ranging from 1.7 to 95.7 × 10^−4 Ω·cm and 0.28 to 1.06, respectively.

Druh

J_imp - Článek v periodiku v databázi Web of Science

CEP obor

—

OECD FORD obor

20506 - Coating and films

Projekt

Výsledek vznikl pri realizaci vícero projektů. Více informací v záložce Projekty.

Návaznosti

P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)

Rok uplatnění

2025

Kód důvěrnosti údajů

S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Název periodika

Surface and Coatings Technology

ISSN

0257-8972

e-ISSN

1879-3347

Svazek periodika

505

Číslo periodika v rámci svazku

JUN 1 2025

Stát vydavatele periodika

CH - Švýcarská konfederace

Počet stran výsledku

9

Strana od-do

nestránkováno

Kód UT WoS článku

001461525100001

EID výsledku v databázi Scopus

2-s2.0-105000979233