Optical and structural characterization of inhomogeneities in a-Si:H to mc-Si transition
Identifikátory výsledku
Kód výsledku v IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F49777513%3A23640%2F10%3A43898566" target="_blank" >RIV/49777513:23640/10:43898566 - isvavai.cz</a>
Výsledek na webu
<a href="http://dx.doi.org/10.1016/j.vacuum.2010.01.021" target="_blank" >http://dx.doi.org/10.1016/j.vacuum.2010.01.021</a>
DOI - Digital Object Identifier
<a href="http://dx.doi.org/10.1016/j.vacuum.2010.01.021" target="_blank" >10.1016/j.vacuum.2010.01.021</a>
Alternativní jazyky
Jazyk výsledku
angličtina
Název v původním jazyce
Optical and structural characterization of inhomogeneities in a-Si:H to mc-Si transition
Popis výsledku v původním jazyce
The a-Si:H ?lms with different thickness and microstructure have been deposited with rf-PECVD using a plasma of silane diluted with hydrogen. The structure and optical analysis were carried out by X-ray diffraction, UV/VIS and Raman spectroscopy. Spectral refractive indices, optical energy band gaps, extinction coef?cients, phases ratio and grain size were determined as a function of the hydrogen dilution (R = H2/SiH4). Hydrogen dilution of silane results in an inhomogeneous growth during which the material evolves from amorphous hydrogenated silicon (a-Si:H) to micro-crystalline hydrogenated silicon (mc-Si:H). XRD analysis indicated that ?lms with R = 0 and R = 20 were amorphous and homogeneous, while ?lms with R = 40 and higher were micro-crystallineconsisting medium range ordered silicon hydride (Si4H) and mc-Si phases with different size of crystallites, which was con?rmed also by Raman spectroscopy.
Název v anglickém jazyce
Optical and structural characterization of inhomogeneities in a-Si:H to mc-Si transition
Popis výsledku anglicky
The a-Si:H ?lms with different thickness and microstructure have been deposited with rf-PECVD using a plasma of silane diluted with hydrogen. The structure and optical analysis were carried out by X-ray diffraction, UV/VIS and Raman spectroscopy. Spectral refractive indices, optical energy band gaps, extinction coef?cients, phases ratio and grain size were determined as a function of the hydrogen dilution (R = H2/SiH4). Hydrogen dilution of silane results in an inhomogeneous growth during which the material evolves from amorphous hydrogenated silicon (a-Si:H) to micro-crystalline hydrogenated silicon (mc-Si:H). XRD analysis indicated that ?lms with R = 0 and R = 20 were amorphous and homogeneous, while ?lms with R = 40 and higher were micro-crystallineconsisting medium range ordered silicon hydride (Si4H) and mc-Si phases with different size of crystallites, which was con?rmed also by Raman spectroscopy.
Klasifikace
Druh
J<sub>x</sub> - Nezařazeno - Článek v odborném periodiku (Jimp, Jsc a Jost)
CEP obor
BM - Fyzika pevných látek a magnetismus
OECD FORD obor
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Návaznosti výsledku
Projekt
<a href="/cs/project/1M06031" target="_blank" >1M06031: Materiály a komponenty pro ochranu životního prostředí</a><br>
Návaznosti
P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)
Ostatní
Rok uplatnění
2010
Kód důvěrnosti údajů
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů
Údaje specifické pro druh výsledku
Název periodika
Vacuum
ISSN
0042-207X
e-ISSN
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Svazek periodika
85
Číslo periodika v rámci svazku
4
Stát vydavatele periodika
GB - Spojené království Velké Británie a Severního Irska
Počet stran výsledku
4
Strana od-do
502-505
Kód UT WoS článku
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EID výsledku v databázi Scopus
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