Microstructure related optical characterization of technologically relevant hydrogenated silicon thin films

Kód výsledku v IS VaVaI

<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F49777513%3A23640%2F08%3A43898285" target="_blank" >RIV/49777513:23640/08:43898285 - isvavai.cz</a>

Výsledek na webu

<a href="http://dx.doi.org/10.1117/12.822348" target="_blank" >http://dx.doi.org/10.1117/12.822348</a>

DOI - Digital Object Identifier

<a href="http://dx.doi.org/10.1117/12.822348" target="_blank" >10.1117/12.822348</a>

Jazyk výsledku

angličtina

Název v původním jazyce

Microstructure related optical characterization of technologically relevant hydrogenated silicon thin films

Popis výsledku v původním jazyce

We report results obtained from measurements of UV Vis, FTIR and Raman spectra carried out on a series of silicon thin films deposited by plasma-enhanced chemical vapor deposition (PECVD) from silane diluted with hydrogen. Spectral refractive indices, extinction coefficients, optical band gap energies, hydrogen content, the microstructure factor, and grain size were determined as a function of the hydrogen dilution. Hydrogen dilution of silane results in an inhomogeneous growth during which the materialevolves from amorphous hydrogenated silicon (a-Si:H) to microcrystalline hydrogenated silicon (c-Si:H). With increasing dilution Si:H films become mixed-phase materials with changing volume fractions of crystalline and amorphous phases and voids. The optical band gap energies were determined from transmittance spectra. The grain size was determined from Raman spectra and the contribution of small and large grains was detected.

Název v anglickém jazyce

Microstructure related optical characterization of technologically relevant hydrogenated silicon thin films

Popis výsledku anglicky

We report results obtained from measurements of UV Vis, FTIR and Raman spectra carried out on a series of silicon thin films deposited by plasma-enhanced chemical vapor deposition (PECVD) from silane diluted with hydrogen. Spectral refractive indices, extinction coefficients, optical band gap energies, hydrogen content, the microstructure factor, and grain size were determined as a function of the hydrogen dilution. Hydrogen dilution of silane results in an inhomogeneous growth during which the materialevolves from amorphous hydrogenated silicon (a-Si:H) to microcrystalline hydrogenated silicon (c-Si:H). With increasing dilution Si:H films become mixed-phase materials with changing volume fractions of crystalline and amorphous phases and voids. The optical band gap energies were determined from transmittance spectra. The grain size was determined from Raman spectra and the contribution of small and large grains was detected.

Druh

D - Stať ve sborníku

CEP obor

BM - Fyzika pevných látek a magnetismus

OECD FORD obor

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Projekt

<a href="/cs/project/1M06031" target="_blank" >1M06031: Materiály a komponenty pro ochranu životního prostředí</a><br>

Návaznosti

P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)

Rok uplatnění

2008

Kód důvěrnosti údajů

S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Název statě ve sborníku

Proceedings SPIE

ISBN

978-80-8070-709-5

ISSN

0277-786X

e-ISSN

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Počet stran výsledku

8

Strana od-do

1-8

Název nakladatele

SPIE

Místo vydání

S.l.

Místo konání akce

Polanica Zdrój

Datum konání akce

8. 9. 2008

Typ akce podle státní příslušnosti

WRD - Celosvětová akce

Kód UT WoS článku

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