INVESTIGATION OF OPTICAL PROPERTIES OF TERNARY ZN-TI-O THIN FILMS PREPARED BY MAGNETRON REACTIVE CO-SPUTTERING

Kód výsledku v IS VaVaI

<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F49777513%3A23640%2F17%3A43932481" target="_blank" >RIV/49777513:23640/17:43932481 - isvavai.cz</a>

Výsledek na webu

<a href="http://dx.doi.org/10.1016/j.apsusc.2017.03.125" target="_blank" >http://dx.doi.org/10.1016/j.apsusc.2017.03.125</a>

DOI - Digital Object Identifier

<a href="http://dx.doi.org/10.1016/j.apsusc.2017.03.125" target="_blank" >10.1016/j.apsusc.2017.03.125</a>

Jazyk výsledku

angličtina

Název v původním jazyce

INVESTIGATION OF OPTICAL PROPERTIES OF TERNARY ZN-TI-O THIN FILMS PREPARED BY MAGNETRON REACTIVE CO-SPUTTERING

Popis výsledku v původním jazyce

Zn-Ti-O thin films with different concentrations of titanium were deposited by reactive magnetron co-sputtering in a reactive Ar/O2 atmosphere from zinc and titanium targets. It was found that with increasing Ti content the structure of the films gradually changes from a fully crystalline pure ZnO wurtzite structure with a strongly preferred columnar orientation to an amorphous Zn-Ti-O material with 12.5 at% Ti. The optical parameters (spectral refractive index and extinction coefficient, optical band gap) and thickness of the films were analysed by the combined evaluation of ellipsometric measurements and measurements of transmittance on a UV-Vis spectrophotometer. For evaluation of optical parameters was used Cody-Lorentz dispersion model.

Název v anglickém jazyce

INVESTIGATION OF OPTICAL PROPERTIES OF TERNARY ZN-TI-O THIN FILMS PREPARED BY MAGNETRON REACTIVE CO-SPUTTERING

Popis výsledku anglicky

Zn-Ti-O thin films with different concentrations of titanium were deposited by reactive magnetron co-sputtering in a reactive Ar/O2 atmosphere from zinc and titanium targets. It was found that with increasing Ti content the structure of the films gradually changes from a fully crystalline pure ZnO wurtzite structure with a strongly preferred columnar orientation to an amorphous Zn-Ti-O material with 12.5 at% Ti. The optical parameters (spectral refractive index and extinction coefficient, optical band gap) and thickness of the films were analysed by the combined evaluation of ellipsometric measurements and measurements of transmittance on a UV-Vis spectrophotometer. For evaluation of optical parameters was used Cody-Lorentz dispersion model.

Druh

J_imp - Článek v periodiku v databázi Web of Science

CEP obor

—

OECD FORD obor

10302 - Condensed matter physics (including formerly solid state physics, supercond.)

Projekt

Výsledek vznikl pri realizaci vícero projektů. Více informací v záložce Projekty.

Návaznosti

P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)

Rok uplatnění

2017

Kód důvěrnosti údajů

S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Název periodika

APPLIED SURFACE SCIENCE

ISSN

0169-4332

e-ISSN

—

Svazek periodika

421

Číslo periodika v rámci svazku

NOV 1 2017

Stát vydavatele periodika

NL - Nizozemsko

Počet stran výsledku

6

Strana od-do

674-679

Kód UT WoS článku

000408756700064

EID výsledku v databázi Scopus

2-s2.0-85016444231