XRD and Electron Diffraction Synergies for Textured Thin Films Structure Investigation

Kód výsledku v IS VaVaI

<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F49777513%3A23640%2F19%3A43957665" target="_blank" >RIV/49777513:23640/19:43957665 - isvavai.cz</a>

Výsledek na webu

<a href="http://dx.doi.org/10.1063/1.5119481" target="_blank" >http://dx.doi.org/10.1063/1.5119481</a>

DOI - Digital Object Identifier

<a href="http://dx.doi.org/10.1063/1.5119481" target="_blank" >10.1063/1.5119481</a>

Jazyk výsledku

angličtina

Název v původním jazyce

XRD and Electron Diffraction Synergies for Textured Thin Films Structure Investigation

Popis výsledku v původním jazyce

In this study, Titanium (Ti) doped zinc oxide (ZnO) thin films were successfully deposited by reactive magnetron co-sputtering in a reactive mode from metallic targets with different Ti concentrations (up to 9 at % of Ti) at relatively low temperatures (~ 200 °C) to investigate changes of the microstructure. Detailed crystal and local atomic structures of the films were characterized via X-ray diffraction (XRD) and on cross-section X-TEM samples on HR-TEM together with electron diffraction (ED) patterns. Obtained results revealed that substitution of Zn sites by Ti ions degrade original hexagonal wurtzite phase of ZnO with increasing doping concentrations through ZnO:Ti-like to ZnTiO3-like materials with a small amount of TiO2 (anatase phase). This study clearly suggests that investigations of textured samples by two geometries of XRD together with 1D and 2D XRD detectors have its limitations and cooperation with X-TEM ED results can lead to better understanding of highly-textured materials

Název v anglickém jazyce

XRD and Electron Diffraction Synergies for Textured Thin Films Structure Investigation

Popis výsledku anglicky

In this study, Titanium (Ti) doped zinc oxide (ZnO) thin films were successfully deposited by reactive magnetron co-sputtering in a reactive mode from metallic targets with different Ti concentrations (up to 9 at % of Ti) at relatively low temperatures (~ 200 °C) to investigate changes of the microstructure. Detailed crystal and local atomic structures of the films were characterized via X-ray diffraction (XRD) and on cross-section X-TEM samples on HR-TEM together with electron diffraction (ED) patterns. Obtained results revealed that substitution of Zn sites by Ti ions degrade original hexagonal wurtzite phase of ZnO with increasing doping concentrations through ZnO:Ti-like to ZnTiO3-like materials with a small amount of TiO2 (anatase phase). This study clearly suggests that investigations of textured samples by two geometries of XRD together with 1D and 2D XRD detectors have its limitations and cooperation with X-TEM ED results can lead to better understanding of highly-textured materials

Druh

D - Stať ve sborníku

CEP obor

—

OECD FORD obor

10302 - Condensed matter physics (including formerly solid state physics, supercond.)

Projekt

<a href="/cs/project/EF15_003%2F0000358" target="_blank" >EF15_003/0000358: Výpočetní a experimentální design pokročilých materiálů s novými funkcionalitami</a><br>

Návaznosti

P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)<br>I - Institucionalni podpora na dlouhodoby koncepcni rozvoj vyzkumne organizace

Rok uplatnění

2019

Kód důvěrnosti údajů

S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Název statě ve sborníku

APCOM 2019 - APPLIED PHYSICS OF CONDENSED MATTER

ISBN

978-0-7354-1873-8

ISSN

0094-243X

e-ISSN

1551-7616

Počet stran výsledku

8

Strana od-do

"NESTRÁNKOVÁNO"

Název nakladatele

American Institute of Physics Inc.

Místo vydání

Spojené státy americké

Místo konání akce

Štrbské Pleso

Datum konání akce

19. 6. 2019

Typ akce podle státní příslušnosti

EUR - Evropská akce

Kód UT WoS článku

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