Electron denstity and electron energy distribution functions in dual-mode microwave/radio frequency plasmas in argon and nitrogen

Kód výsledku v IS VaVaI

<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F60076658%3A12410%2F01%3A00003007" target="_blank" >RIV/60076658:12410/01:00003007 - isvavai.cz</a>

Výsledek na webu

—

DOI - Digital Object Identifier

—

Jazyk výsledku

angličtina

Název v původním jazyce

Electron denstity and electron energy distribution functions in dual-mode microwave/radio frequency plasmas in argon and nitrogen

Popis výsledku v původním jazyce

Dual-mode microwave/radiofrequency (MW/RF) plasmas were systematically investigated by means of Langmuir probe measurements and by mass spectrometry. Maxwellian-like electron distribution functions were found for both MW and MW/RF argon plasmas, while the distribution functions measured in nitrogen revealed two groups of electrons with different energies. Both in argon and nitrogen, the electron density, ne decreased with rising pressure, almost independent of the bias voltage on the RF electrode. The ne value decays exponentially with distance from the MW applicator with a characteristic length comparable to the skin depth. Comparison of ne values from the probe measurements with values calculated from the ion energy distribution functions and ion fluxes exhibit an excellent agreement.

Název v anglickém jazyce

Electron denstity and electron energy distribution functions in dual-mode microwave/radio frequency plasmas in argon and nitrogen

Popis výsledku anglicky

Dual-mode microwave/radiofrequency (MW/RF) plasmas were systematically investigated by means of Langmuir probe measurements and by mass spectrometry. Maxwellian-like electron distribution functions were found for both MW and MW/RF argon plasmas, while the distribution functions measured in nitrogen revealed two groups of electrons with different energies. Both in argon and nitrogen, the electron density, ne decreased with rising pressure, almost independent of the bias voltage on the RF electrode. The ne value decays exponentially with distance from the MW applicator with a characteristic length comparable to the skin depth. Comparison of ne values from the probe measurements with values calculated from the ion energy distribution functions and ion fluxes exhibit an excellent agreement.

Druh

D - Stať ve sborníku

CEP obor

BL - Fyzika plasmatu a výboje v plynech

OECD FORD obor

—

Projekt

—

Návaznosti

Z - Vyzkumny zamer (s odkazem do CEZ)

Rok uplatnění

2001

Kód důvěrnosti údajů

S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Název statě ve sborníku

15th International symposium on Plasma Chemistry

ISBN

—

ISSN

—

e-ISSN

—

Počet stran výsledku

6

Strana od-do

653-658

Název nakladatele

GREMI, CNRS/University of Orléans

Místo vydání

University of Orléans

Místo konání akce

Orléans

Datum konání akce

19. 7. 2001

Typ akce podle státní příslušnosti

EUR - Evropská akce

Kód UT WoS článku

—