TiOx surface properties in dependency on Glancing Angle Deposition parametres
Identifikátory výsledku
Kód výsledku v IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F60076658%3A12410%2F11%3A43883191" target="_blank" >RIV/60076658:12410/11:43883191 - isvavai.cz</a>
Výsledek na webu
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DOI - Digital Object Identifier
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Alternativní jazyky
Jazyk výsledku
angličtina
Název v původním jazyce
TiOx surface properties in dependency on Glancing Angle Deposition parametres
Popis výsledku v původním jazyce
The aim of this paper is to show the importance of Glancing Angle Deposition parameters on morphology and surface properties thin TiOx films. Special interest was focused on the roughness investigated layers. Thin films were deposited by DC unbalanced magnetron sputtering at low temperature. Four types of architecture were achieved by Glancing Angle Deposition Methods. Those layers were diagnosed by AFM and SEM. TiNxOy films were investigated besides the TiOx layers. All the films were deposited for twotyped of GLAD, namely for Reactive Gas Constant Flow (RGCF) and Reactive Gas Pulsing Proccess (RGPP) during the deposition. The influence of deposition method is investigated in focus on surface properties.
Název v anglickém jazyce
TiOx surface properties in dependency on Glancing Angle Deposition parametres
Popis výsledku anglicky
The aim of this paper is to show the importance of Glancing Angle Deposition parameters on morphology and surface properties thin TiOx films. Special interest was focused on the roughness investigated layers. Thin films were deposited by DC unbalanced magnetron sputtering at low temperature. Four types of architecture were achieved by Glancing Angle Deposition Methods. Those layers were diagnosed by AFM and SEM. TiNxOy films were investigated besides the TiOx layers. All the films were deposited for twotyped of GLAD, namely for Reactive Gas Constant Flow (RGCF) and Reactive Gas Pulsing Proccess (RGPP) during the deposition. The influence of deposition method is investigated in focus on surface properties.
Klasifikace
Druh
O - Ostatní výsledky
CEP obor
BL - Fyzika plasmatu a výboje v plynech
OECD FORD obor
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Návaznosti výsledku
Projekt
<a href="/cs/project/KAN101120701" target="_blank" >KAN101120701: Nanokompozitní vrstvy a nanočástice vytvářené v nízkotlakém plazmatu pro povrchové modifikace</a><br>
Návaznosti
P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)
Ostatní
Rok uplatnění
2011
Kód důvěrnosti údajů
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů