Transfer of thin, patterned gold layers from poly(methyl methacrylate) stamp onto photoresist surface

Kód výsledku v IS VaVaI

<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F60461373%3A22310%2F14%3A43898002" target="_blank" >RIV/60461373:22310/14:43898002 - isvavai.cz</a>

Nalezeny alternativní kódy

RIV/68407700:21230/14:00236042

Výsledek na webu

<a href="http://www.sciencedirect.com/science/article/pii/S0040609013016672" target="_blank" >http://www.sciencedirect.com/science/article/pii/S0040609013016672</a>

DOI - Digital Object Identifier

<a href="http://dx.doi.org/10.1016/j.tsf.2013.10.056" target="_blank" >10.1016/j.tsf.2013.10.056</a>

Jazyk výsledku

angličtina

Název v původním jazyce

Transfer of thin, patterned gold layers from poly(methyl methacrylate) stamp onto photoresist surface

Popis výsledku v původním jazyce

A simple technique for the transfer of thin gold layer from poly(methyl methacrylate) (PMMA) stamp onto SU-8 photoresist is described and verified. The procedure comprises sputtering of thin gold layer on flat or laser patterned PMMA, bringing the PMMA stamp into contact with photoresist substrate, transferring of the gold layer onto photoresist and finally dissolution of the PMMA stamp. Surface morphology of as sputtered and transferred gold layers was determined by profilometry, confocal microscopy, and atomic force microscopy (AFM) techniques at three different scales. Electrical properties were examined by conductive AFM technique. The transfer from patterned PMMA stamp leads to simultaneous patterning of the gold layer and creation of a system ofordered conductive gold strips separated by non-conductive areas on photoresist surface.

Název v anglickém jazyce

Transfer of thin, patterned gold layers from poly(methyl methacrylate) stamp onto photoresist surface

Popis výsledku anglicky

A simple technique for the transfer of thin gold layer from poly(methyl methacrylate) (PMMA) stamp onto SU-8 photoresist is described and verified. The procedure comprises sputtering of thin gold layer on flat or laser patterned PMMA, bringing the PMMA stamp into contact with photoresist substrate, transferring of the gold layer onto photoresist and finally dissolution of the PMMA stamp. Surface morphology of as sputtered and transferred gold layers was determined by profilometry, confocal microscopy, and atomic force microscopy (AFM) techniques at three different scales. Electrical properties were examined by conductive AFM technique. The transfer from patterned PMMA stamp leads to simultaneous patterning of the gold layer and creation of a system ofordered conductive gold strips separated by non-conductive areas on photoresist surface.

Druh

J_x - Nezařazeno - Článek v odborném periodiku (Jimp, Jsc a Jost)

CEP obor

JJ - Ostatní materiály

OECD FORD obor

—

Projekt

Výsledek vznikl pri realizaci vícero projektů. Více informací v záložce Projekty.

Návaznosti

P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)

Rok uplatnění

2014

Kód důvěrnosti údajů

S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Název periodika

Thin Solid Films

ISSN

0040-6090

e-ISSN

—

Svazek periodika

550

Číslo periodika v rámci svazku

JAN 1 2014

Stát vydavatele periodika

CH - Švýcarská konfederace

Počet stran výsledku

5

Strana od-do

459-463

Kód UT WoS článku

000328499700069

EID výsledku v databázi Scopus

—