Influence of Substrate Temperature on the Morphology and Phase Composition of Thin Films Prepared From Y-123 Targets by the IJD Method

Kód výsledku v IS VaVaI

<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F60461373%3A22310%2F23%3A43927604" target="_blank" >RIV/60461373:22310/23:43927604 - isvavai.cz</a>

Nalezeny alternativní kódy

RIV/68407700:21340/23:00366345

Výsledek na webu

<a href="https://ieeexplore.ieee.org/document/10057012/authors#authors" target="_blank" >https://ieeexplore.ieee.org/document/10057012/authors#authors</a>

DOI - Digital Object Identifier

<a href="http://dx.doi.org/10.1109/TASC.2023.3249642" target="_blank" >10.1109/TASC.2023.3249642</a>

Jazyk výsledku

angličtina

Název v původním jazyce

Influence of Substrate Temperature on the Morphology and Phase Composition of Thin Films Prepared From Y-123 Targets by the IJD Method

Popis výsledku v původním jazyce

The Ionized Jet Deposition method (IJD) is a relatively new and rapidly evolving physical vapour deposition technique. IJD has significant potential for cost-effective scale-up fabrication of thin films. Furthermore, IJD&apos;s flexibility allows the preparation of thin films from a wide range of materials, due to the possibility of adjusting many depositions parameters. The substrate temperature is crucial as it fundamentally affects the deposition of Y1Ba2Cu3O7-x (YBCO or Y-123). Desired Y-123 phase formation depends primarily on the substrate temperature and target stoichiometry. This work was focused on substrate temperature optimization during the deposition in the range from 700 to 830 °C. Thin films were prepared using Y-123 targets and a constant accelerating voltage of 14 kV. The phase composition of the samples was analysed by the XRD using the grazing incident geometry. The homogeneity and surface morphology were studied by SEM method confirming a surface morphology with &apos;droplets&apos; typical for the HTS thin films prepared by IJD. © 2002-2011 IEEE.

Název v anglickém jazyce

Influence of Substrate Temperature on the Morphology and Phase Composition of Thin Films Prepared From Y-123 Targets by the IJD Method

Popis výsledku anglicky

The Ionized Jet Deposition method (IJD) is a relatively new and rapidly evolving physical vapour deposition technique. IJD has significant potential for cost-effective scale-up fabrication of thin films. Furthermore, IJD&apos;s flexibility allows the preparation of thin films from a wide range of materials, due to the possibility of adjusting many depositions parameters. The substrate temperature is crucial as it fundamentally affects the deposition of Y1Ba2Cu3O7-x (YBCO or Y-123). Desired Y-123 phase formation depends primarily on the substrate temperature and target stoichiometry. This work was focused on substrate temperature optimization during the deposition in the range from 700 to 830 °C. Thin films were prepared using Y-123 targets and a constant accelerating voltage of 14 kV. The phase composition of the samples was analysed by the XRD using the grazing incident geometry. The homogeneity and surface morphology were studied by SEM method confirming a surface morphology with &apos;droplets&apos; typical for the HTS thin films prepared by IJD. © 2002-2011 IEEE.

Druh

J_SC - Článek v periodiku v databázi SCOPUS

CEP obor

—

OECD FORD obor

10402 - Inorganic and nuclear chemistry

Projekt

Výsledek vznikl pri realizaci vícero projektů. Více informací v záložce Projekty.

Návaznosti

P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)

Rok uplatnění

2023

Kód důvěrnosti údajů

S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Název periodika

IEEE TRANSACTIONS ON APPLIED SUPERCONDUCTIVITY

ISSN

1051-8223

e-ISSN

—

Svazek periodika

33

Číslo periodika v rámci svazku

5

Stát vydavatele periodika

US - Spojené státy americké

Počet stran výsledku

4

Strana od-do

1-4

Kód UT WoS článku

—

EID výsledku v databázi Scopus

2-s2.0-85149419392