Desorption of fragments upon electron impact on adsorbates: implications for electron beam induced deposition

Kód výsledku v IS VaVaI

<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F61388955%3A_____%2F25%3A00640840" target="_blank" >RIV/61388955:_____/25:00640840 - isvavai.cz</a>

Výsledek na webu

<a href="https://hdl.handle.net/11104/0371707" target="_blank" >https://hdl.handle.net/11104/0371707</a>

DOI - Digital Object Identifier

<a href="http://dx.doi.org/10.1039/d5cp02552d" target="_blank" >10.1039/d5cp02552d</a>

Jazyk výsledku

angličtina

Název v původním jazyce

Desorption of fragments upon electron impact on adsorbates: implications for electron beam induced deposition

Popis výsledku v původním jazyce

A molecular level understanding of surface chemistry involved in the focused electron beam induced deposition (FEBID) with metalorganic molecules is crucial for enhancing the metal content in the fabricated nanostructures. Here, we investigate the FEBID process of trimethyl(methylcyclopentadienyl)platinum(iv) [MeCpPtMe3] using focused electron beam induced mass spectrometry (FEBiMS), a recently developed in situ analytical technique. A comparison with experimental gas-phase electron impact fragmentation spectra, alongside density-functional theory calculations and molecular dynamics simulations is presented. The results indicate that charged fragments generated via dissociative ionization exhibit strong adsorption to the substrate and lack sufficient kinetic energy to desorb. This suggests that the most observed charged species during FEBID originate from gas-phase fragmentation above the surface. Furthermore, this study proposes processes like charge neutralization and dissociative recombination, not previously considered in FEBID, could be significant contributors to increasing the metal content in the resulting nanostructures.

Název v anglickém jazyce

Desorption of fragments upon electron impact on adsorbates: implications for electron beam induced deposition

Popis výsledku anglicky

A molecular level understanding of surface chemistry involved in the focused electron beam induced deposition (FEBID) with metalorganic molecules is crucial for enhancing the metal content in the fabricated nanostructures. Here, we investigate the FEBID process of trimethyl(methylcyclopentadienyl)platinum(iv) [MeCpPtMe3] using focused electron beam induced mass spectrometry (FEBiMS), a recently developed in situ analytical technique. A comparison with experimental gas-phase electron impact fragmentation spectra, alongside density-functional theory calculations and molecular dynamics simulations is presented. The results indicate that charged fragments generated via dissociative ionization exhibit strong adsorption to the substrate and lack sufficient kinetic energy to desorb. This suggests that the most observed charged species during FEBID originate from gas-phase fragmentation above the surface. Furthermore, this study proposes processes like charge neutralization and dissociative recombination, not previously considered in FEBID, could be significant contributors to increasing the metal content in the resulting nanostructures.

Druh

J_imp - Článek v periodiku v databázi Web of Science

CEP obor

—

OECD FORD obor

10403 - Physical chemistry

Projekt

Výsledek vznikl pri realizaci vícero projektů. Více informací v záložce Projekty.

Návaznosti

I - Institucionalni podpora na dlouhodoby koncepcni rozvoj vyzkumne organizace

Rok uplatnění

2025

Kód důvěrnosti údajů

S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Název periodika

Physical Chemistry Chemical Physics

ISSN

1463-9076

e-ISSN

1463-9084

Svazek periodika

27

Číslo periodika v rámci svazku

42

Stát vydavatele periodika

GB - Spojené království Velké Británie a Severního Irska

Počet stran výsledku

12

Strana od-do

22734-22745

Kód UT WoS článku

001593100900001

EID výsledku v databázi Scopus

2-s2.0-105020411916