Preparation of heterogenous copper-titanium oxides for chemiresistor applications

Kód výsledku v IS VaVaI

<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F61388980%3A_____%2F20%3A00538506" target="_blank" >RIV/61388980:_____/20:00538506 - isvavai.cz</a>

Nalezeny alternativní kódy

RIV/67985858:_____/20:00538349 RIV/67985882:_____/20:00538349 RIV/61389005:_____/20:00538349

Výsledek na webu

<a href="http://dx.doi.org/10.1016/j.matpr.2020.05.061" target="_blank" >http://dx.doi.org/10.1016/j.matpr.2020.05.061</a>

DOI - Digital Object Identifier

<a href="http://dx.doi.org/10.1016/j.matpr.2020.05.061" target="_blank" >10.1016/j.matpr.2020.05.061</a>

Jazyk výsledku

angličtina

Název v původním jazyce

Preparation of heterogenous copper-titanium oxides for chemiresistor applications

Popis výsledku v původním jazyce

Metal oxide based gas sensors (MOS) found a wide application as modular parts in microelectronic devices due to their technological compatibility, low cost and outstanding sensing capabilities to different chemical species. The functionality of such chemiresistors consists of a change of the electric resistance/impedance of a semiconducting sensitive layer when gases with either oxidizing or reducing properties appear in the surrounding atmosphere. Earlier, the majority of the investigated chemiresistors were based on single phase, homogenous semiconductors. The combination of two different phases and hence the implementation of heterojunctions (HJs) on chemiresistors offers a way to increase the sensor performance, especially the sensitivity of the sensor. In this work, chemiresistors based on CuO-TiO2 acting as p-n heterojunction were developed. Thin sensitive layers were deposited by a two-step process. Cu Ti thin layers were prepared by ion beam sputtering using an Ar ion beam and, subsequently, oxidized by thermal annealing in air at 400 degrees C for 7 h. The stoichiometry of the metallic films was analyzed by the Rutherford Back-scattering (RBS) using 2 MeV alpha-particles. The gas sensing properties of the oxidic thin films (deposited on prefabricated substrates containing interdigital electrodes) were analyzed in an atmosphere containing 100 ppm of either methanol, hydrogen and acetaldehyde or 10.6 ppm of nitrogen dioxide.

Název v anglickém jazyce

Preparation of heterogenous copper-titanium oxides for chemiresistor applications

Popis výsledku anglicky

Metal oxide based gas sensors (MOS) found a wide application as modular parts in microelectronic devices due to their technological compatibility, low cost and outstanding sensing capabilities to different chemical species. The functionality of such chemiresistors consists of a change of the electric resistance/impedance of a semiconducting sensitive layer when gases with either oxidizing or reducing properties appear in the surrounding atmosphere. Earlier, the majority of the investigated chemiresistors were based on single phase, homogenous semiconductors. The combination of two different phases and hence the implementation of heterojunctions (HJs) on chemiresistors offers a way to increase the sensor performance, especially the sensitivity of the sensor. In this work, chemiresistors based on CuO-TiO2 acting as p-n heterojunction were developed. Thin sensitive layers were deposited by a two-step process. Cu Ti thin layers were prepared by ion beam sputtering using an Ar ion beam and, subsequently, oxidized by thermal annealing in air at 400 degrees C for 7 h. The stoichiometry of the metallic films was analyzed by the Rutherford Back-scattering (RBS) using 2 MeV alpha-particles. The gas sensing properties of the oxidic thin films (deposited on prefabricated substrates containing interdigital electrodes) were analyzed in an atmosphere containing 100 ppm of either methanol, hydrogen and acetaldehyde or 10.6 ppm of nitrogen dioxide.

Druh

D - Stať ve sborníku

CEP obor

—

OECD FORD obor

10402 - Inorganic and nuclear chemistry

Projekt

Výsledek vznikl pri realizaci vícero projektů. Více informací v záložce Projekty.

Návaznosti

I - Institucionalni podpora na dlouhodoby koncepcni rozvoj vyzkumne organizace

Rok uplatnění

2020

Kód důvěrnosti údajů

S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Název statě ve sborníku

Materials Today: Proceedings

ISBN

—

ISSN

2214-7853

e-ISSN

—

Počet stran výsledku

5

Strana od-do

"Roč. 33 (2020)"

Název nakladatele

Elsevier

Místo vydání

Amsterdam

Místo konání akce

Warsaw

Datum konání akce

16. 9. 2019

Typ akce podle státní příslušnosti

EUR - Evropská akce

Kód UT WoS článku

000599991700018