Studium vrstech TiOx připravených technikou PVD metodami RBS a XPS

Kód výsledku v IS VaVaI

<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F61389005%3A_____%2F04%3A00105673" target="_blank" >RIV/61389005:_____/04:00105673 - isvavai.cz</a>

Výsledek na webu

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DOI - Digital Object Identifier

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Jazyk výsledku

angličtina

Název v původním jazyce

RBS and XPS study of TiOx layers prepared by the PVD technique .

Popis výsledku v původním jazyce

The PVD coatings were prepared using Sulzer Innotec's closed magnetic field unbalanced magnetron sputtering facility. The deposition parameters of bias and oxygen flow rate were varied. The prepared samples were analysed by RBS (Rutherford backscatteringspectrometry) to determine the Ti/O ratios and the thicknesses of the coatings, and by ERDA (elastic recoil detection analysis) to investigate the hydrogen content in the surface layer. XPS was used to characterize the near-surface composition and chemical bonding. Measurements of mechanical properties (hardness and thickness) were performed. We concluded from RBS analysis that Ti content is enhanced according to the increased bias and the decreased oxygen flow rate. We observed the increasing hardnessin the case of the higher Ti content layers prepared. We found that a contaminated surface layer exists in which hydrogen, oxygen and carbon are incorporated.

Název v anglickém jazyce

RBS and XPS study of TiOx layers prepared by the PVD technique .

Popis výsledku anglicky

The PVD coatings were prepared using Sulzer Innotec's closed magnetic field unbalanced magnetron sputtering facility. The deposition parameters of bias and oxygen flow rate were varied. The prepared samples were analysed by RBS (Rutherford backscatteringspectrometry) to determine the Ti/O ratios and the thicknesses of the coatings, and by ERDA (elastic recoil detection analysis) to investigate the hydrogen content in the surface layer. XPS was used to characterize the near-surface composition and chemical bonding. Measurements of mechanical properties (hardness and thickness) were performed. We concluded from RBS analysis that Ti content is enhanced according to the increased bias and the decreased oxygen flow rate. We observed the increasing hardnessin the case of the higher Ti content layers prepared. We found that a contaminated surface layer exists in which hydrogen, oxygen and carbon are incorporated.

Druh

J_x - Nezařazeno - Článek v odborném periodiku (Jimp, Jsc a Jost)

CEP obor

BM - Fyzika pevných látek a magnetismus

OECD FORD obor

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Projekt

<a href="/cs/project/GP102%2F01%2FD069" target="_blank" >GP102/01/D069: Analýza progresivních materiálů jadernými analytickými metodami</a><br>

Návaznosti

Z - Vyzkumny zamer (s odkazem do CEZ)

Rok uplatnění

2004

Kód důvěrnosti údajů

S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Název periodika

Survace and Interface Analysis

ISSN

0142-2421

e-ISSN

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Svazek periodika

36

Číslo periodika v rámci svazku

8

Stát vydavatele periodika

GB - Spojené království Velké Británie a Severního Irska

Počet stran výsledku

3

Strana od-do

1171-1173

Kód UT WoS článku

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EID výsledku v databázi Scopus

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