RBS and XPS Study of TiOx Layers Prepared by PVD Technique

Kód výsledku v IS VaVaI

<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F46747885%3A24210%2F03%3A24210122" target="_blank" >RIV/46747885:24210/03:24210122 - isvavai.cz</a>

Výsledek na webu

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DOI - Digital Object Identifier

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Jazyk výsledku

angličtina

Název v původním jazyce

RBS and XPS Study of TiOx Layers Prepared by PVD Technique

Popis výsledku v původním jazyce

The PVD-coatings were prepared using Sulzer Innotec?s closed magnetic field unbalanced magnetron sputtering facility. The deposition parameters the bias and oxygen flow rate were changed. The samples prepared were analysed by RBS (Rutherford Backscatterig Spectrometry) to determine the Ti/O ratios and the thicknesses of the coatings and by ERDA (Elastic Recoil Detection Analysis) to investigate the hydrogen content in the surface layer. XPS (X-ray induced Photoelectron Spectroscopy) was used to characteise the near surface composition and chemical bonding. Measurements of mechanical properties (hardness and thickness) were performed. We concluded from RBS analysis that Ti content is enhanced by the increased bias and the decreased oxygen flow rate. Webserved the increasing hardness according to the higher Ti content in the layers prepared. We found out that the contaminated surface layer exist in which the hydrogen and carbon are incorporated.

Název v anglickém jazyce

RBS and XPS Study of TiOx Layers Prepared by PVD Technique

Popis výsledku anglicky

The PVD-coatings were prepared using Sulzer Innotec?s closed magnetic field unbalanced magnetron sputtering facility. The deposition parameters the bias and oxygen flow rate were changed. The samples prepared were analysed by RBS (Rutherford Backscatterig Spectrometry) to determine the Ti/O ratios and the thicknesses of the coatings and by ERDA (Elastic Recoil Detection Analysis) to investigate the hydrogen content in the surface layer. XPS (X-ray induced Photoelectron Spectroscopy) was used to characteise the near surface composition and chemical bonding. Measurements of mechanical properties (hardness and thickness) were performed. We concluded from RBS analysis that Ti content is enhanced by the increased bias and the decreased oxygen flow rate. Webserved the increasing hardness according to the higher Ti content in the layers prepared. We found out that the contaminated surface layer exist in which the hydrogen and carbon are incorporated.

Druh

J_x - Nezařazeno - Článek v odborném periodiku (Jimp, Jsc a Jost)

CEP obor

BL - Fyzika plasmatu a výboje v plynech

OECD FORD obor

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Projekt

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Návaznosti

Z - Vyzkumny zamer (s odkazem do CEZ)

Rok uplatnění

2003

Kód důvěrnosti údajů

S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Název periodika

Surface and Interface Analysis

ISSN

0142-2421

e-ISSN

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Svazek periodika

Neuveden

Číslo periodika v rámci svazku

2003

Stát vydavatele periodika

US - Spojené státy americké

Počet stran výsledku

8

Strana od-do

139-147

Kód UT WoS článku

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EID výsledku v databázi Scopus

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