Simulation of RBS spectra with known 3D sample surface roughness

Kód výsledku v IS VaVaI

<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F61389005%3A_____%2F17%3A00479634" target="_blank" >RIV/61389005:_____/17:00479634 - isvavai.cz</a>

Nalezeny alternativní kódy

RIV/60461373:22310/17:43914207 RIV/44555601:13440/17:43892903

Výsledek na webu

<a href="http://dx.doi.org/10.1016/j.nimb.2017.02.020" target="_blank" >http://dx.doi.org/10.1016/j.nimb.2017.02.020</a>

DOI - Digital Object Identifier

<a href="http://dx.doi.org/10.1016/j.nimb.2017.02.020" target="_blank" >10.1016/j.nimb.2017.02.020</a>

Jazyk výsledku

angličtina

Název v původním jazyce

Simulation of RBS spectra with known 3D sample surface roughness

Popis výsledku v původním jazyce

The Rutherford Backscattering Spectrometry (RBS) is a technique for elemental depth profiling with a nanometer depth resolution. Possible surface roughness of analysed samples can deteriorate the RBS spectra and makes their interpretation more difficult and ambiguous. This work describes the simulation of RBS spectra which takes into account real 3D morphology of the sample surface obtained by AFM method. The RBS spectrum is calculated as a sum of the many particular spectra obtained for randomly chosen particle trajectories over sample 3D landscape. The spectra, simulated for different ion beam incidence angles, are compared to the experimental ones measured with 2.0 MeV He-4(+) ions. The main aim of this work is to obtain more definite information on how a particular surface morphology and measuring geometry affects the RBS spectra and derived elemental depth profiles. A reasonable agreement between the measured and simulated spectra was found and the results indicate that the AFM data on the sample surface can be used for the simulation of RBS spectra.

Název v anglickém jazyce

Simulation of RBS spectra with known 3D sample surface roughness

Popis výsledku anglicky

The Rutherford Backscattering Spectrometry (RBS) is a technique for elemental depth profiling with a nanometer depth resolution. Possible surface roughness of analysed samples can deteriorate the RBS spectra and makes their interpretation more difficult and ambiguous. This work describes the simulation of RBS spectra which takes into account real 3D morphology of the sample surface obtained by AFM method. The RBS spectrum is calculated as a sum of the many particular spectra obtained for randomly chosen particle trajectories over sample 3D landscape. The spectra, simulated for different ion beam incidence angles, are compared to the experimental ones measured with 2.0 MeV He-4(+) ions. The main aim of this work is to obtain more definite information on how a particular surface morphology and measuring geometry affects the RBS spectra and derived elemental depth profiles. A reasonable agreement between the measured and simulated spectra was found and the results indicate that the AFM data on the sample surface can be used for the simulation of RBS spectra.

Druh

J_imp - Článek v periodiku v databázi Web of Science

CEP obor

—

OECD FORD obor

10304 - Nuclear physics

Projekt

Výsledek vznikl pri realizaci vícero projektů. Více informací v záložce Projekty.

Návaznosti

P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)

Rok uplatnění

2017

Kód důvěrnosti údajů

S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Název periodika

Nuclear Instruments & Methods in Physics Research Section B

ISSN

0168-583X

e-ISSN

—

Svazek periodika

406

Číslo periodika v rámci svazku

SEP

Stát vydavatele periodika

NL - Nizozemsko

Počet stran výsledku

5

Strana od-do

99-103

Kód UT WoS článku

000409152800021

EID výsledku v databázi Scopus

2-s2.0-85013174057