Non-thermal surface modification of solids induced by EUV laser pulses(ICOPS?2012, 1P-166)

Kód výsledku v IS VaVaI

<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F61389021%3A_____%2F12%3A00386547" target="_blank" >RIV/61389021:_____/12:00386547 - isvavai.cz</a>

Výsledek na webu

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DOI - Digital Object Identifier

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Jazyk výsledku

angličtina

Název v původním jazyce

Non-thermal surface modification of solids induced by EUV laser pulses(ICOPS?2012, 1P-166)

Popis výsledku v původním jazyce

Předneseno na konf.:Plasma Science(ICOPS), 2012 Abstracts IEEE International Conference on,Edinburgh,GB,08.07.2012-13.07.2012, We report results of experiments connected with surface modi?cation of organic and inorganic materials with an intense EUV laser beam. The samples were irradiated by laser beam from a discharge-plasma EUV source (with wavelength 46.9 nm) based on a high-current capillary discharge driver. A detailed description of our driver CAPEX can be found in the early published paper [1]. The laser beam is focused with a spherical (R=2100 mm) Si/Sc multilayer-coated mirror on polymethylmethacrylate (PMMA), gold-covered-PMMA and gallium arsenide (GaAs) samples. For analysis of laser beam footprints an atomic-force microscope (AFM) was used.It turned out that the energy of focused EUV laser beam is sufficient for ablation not only easily ablative material PMMA but also thin layer of gold (thickness 40 nm) and GaAs by single shot, even if the focus is significantly

Název v anglickém jazyce

Non-thermal surface modification of solids induced by EUV laser pulses(ICOPS?2012, 1P-166)

Popis výsledku anglicky

Předneseno na konf.:Plasma Science(ICOPS), 2012 Abstracts IEEE International Conference on,Edinburgh,GB,08.07.2012-13.07.2012, We report results of experiments connected with surface modi?cation of organic and inorganic materials with an intense EUV laser beam. The samples were irradiated by laser beam from a discharge-plasma EUV source (with wavelength 46.9 nm) based on a high-current capillary discharge driver. A detailed description of our driver CAPEX can be found in the early published paper [1]. The laser beam is focused with a spherical (R=2100 mm) Si/Sc multilayer-coated mirror on polymethylmethacrylate (PMMA), gold-covered-PMMA and gallium arsenide (GaAs) samples. For analysis of laser beam footprints an atomic-force microscope (AFM) was used.It turned out that the energy of focused EUV laser beam is sufficient for ablation not only easily ablative material PMMA but also thin layer of gold (thickness 40 nm) and GaAs by single shot, even if the focus is significantly

Druh

O - Ostatní výsledky

CEP obor

BL - Fyzika plasmatu a výboje v plynech

OECD FORD obor

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Projekt

<a href="/cs/project/LA08024" target="_blank" >LA08024: Výzkum v rámci Mezinárodního centra hustého magnetizovaného plazmatu</a><br>

Návaznosti

Z - Vyzkumny zamer (s odkazem do CEZ)

Rok uplatnění

2012

Kód důvěrnosti údajů

S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů