Sol-gel preparation of silica and titania thin films

Kód výsledku v IS VaVaI

<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F61389021%3A_____%2F16%3A00469364" target="_blank" >RIV/61389021:_____/16:00469364 - isvavai.cz</a>

Výsledek na webu

<a href="http://dx.doi.org/10.1117/12.2257325" target="_blank" >http://dx.doi.org/10.1117/12.2257325</a>

DOI - Digital Object Identifier

<a href="http://dx.doi.org/10.1117/12.2257325" target="_blank" >10.1117/12.2257325</a>

Jazyk výsledku

angličtina

Název v původním jazyce

Sol-gel preparation of silica and titania thin films

Popis výsledku v původním jazyce

Thin films of silicon dioxide (SiO2) and titanium dioxide (TiO2) for application in precision optics prepared via the solgel route are being investigated in this paper. The sol-gel process presents a low cost approach, which is capable of tailoring thin films of various materials in optical grade quality. Both SiO2 and TiO2 are materials well known for their application in the field of anti-reflective and also highly reflective optical coatings. For precision optics purposes, thickness control and high quality of such coatings are of utmost importance. In this work, thin films were deposited on microscope glass slides substrates using the dip-coating technique from a solution based on alkoxide precursors of tetraethyl orthosilicate (TEOS) and titanium isopropoxide (TIP) for SiO2 and TiO2, respectively. As-deposited films were studied using spectroscopic ellipsometry to determine their thickness and refractive index. Using a semi-empirical equation, a relationship between the coating speed and the heat-treated film thickness was described for both SiO2 and TiO2 thin films. This allows us to control the final heat-treated thin film thickness by simply adjusting the coating speed. Furthermore, films’ surface was studied using the white-light interferometry. As-prepared films exhibited low surface roughness with the area roughness parameter Sq being on average of 0.799 nm and 0.33 nm for SiO2 and TiO2, respectively.

Název v anglickém jazyce

Sol-gel preparation of silica and titania thin films

Popis výsledku anglicky

Thin films of silicon dioxide (SiO2) and titanium dioxide (TiO2) for application in precision optics prepared via the solgel route are being investigated in this paper. The sol-gel process presents a low cost approach, which is capable of tailoring thin films of various materials in optical grade quality. Both SiO2 and TiO2 are materials well known for their application in the field of anti-reflective and also highly reflective optical coatings. For precision optics purposes, thickness control and high quality of such coatings are of utmost importance. In this work, thin films were deposited on microscope glass slides substrates using the dip-coating technique from a solution based on alkoxide precursors of tetraethyl orthosilicate (TEOS) and titanium isopropoxide (TIP) for SiO2 and TiO2, respectively. As-deposited films were studied using spectroscopic ellipsometry to determine their thickness and refractive index. Using a semi-empirical equation, a relationship between the coating speed and the heat-treated film thickness was described for both SiO2 and TiO2 thin films. This allows us to control the final heat-treated thin film thickness by simply adjusting the coating speed. Furthermore, films’ surface was studied using the white-light interferometry. As-prepared films exhibited low surface roughness with the area roughness parameter Sq being on average of 0.799 nm and 0.33 nm for SiO2 and TiO2, respectively.

Druh

D - Stať ve sborníku

CEP obor

JH - Keramika, žáruvzdorné materiály a skla

OECD FORD obor

—

Projekt

<a href="/cs/project/LO1206" target="_blank" >LO1206: Moderní optické systémy a technologie</a><br>

Návaznosti

I - Institucionalni podpora na dlouhodoby koncepcni rozvoj vyzkumne organizace

Rok uplatnění

2016

Kód důvěrnosti údajů

S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Název statě ve sborníku

Proceedings of SPIE 10151, Optics and Measurement International Conference 2016

ISBN

978-1-5106-0753-8

ISSN

0277-786X

e-ISSN

—

Počet stran výsledku

4

Strana od-do

—

Název nakladatele

SPIE, Society of Photo-Optical Instrumentation Engineers

Místo vydání

Bellingham

Místo konání akce

Liberec

Datum konání akce

11. 10. 2016

Typ akce podle státní příslušnosti

WRD - Celosvětová akce

Kód UT WoS článku

000393154700046