Surface topography measurement by frequency sweeping digital holography.

Kód výsledku v IS VaVaI

<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F61389021%3A_____%2F17%3A00484767" target="_blank" >RIV/61389021:_____/17:00484767 - isvavai.cz</a>

Výsledek na webu

<a href="http://dx.doi.org/10.1364/AO.56.007808" target="_blank" >http://dx.doi.org/10.1364/AO.56.007808</a>

DOI - Digital Object Identifier

<a href="http://dx.doi.org/10.1364/AO.56.007808" target="_blank" >10.1364/AO.56.007808</a>

Jazyk výsledku

angličtina

Název v původním jazyce

Surface topography measurement by frequency sweeping digital holography.

Popis výsledku v původním jazyce

High-precision measurements of mechanical parts' surface topography represent an essential task in many industry sectors. Examples of such tasks are, e.g., precise alignments of opto-mechanical systems, large object deformation measurements, evaluation of object shape, and many others. Today, the standard method used for such measurements is based on use of coordinate measuring machines (CMMs). Unfortunately, CMMs have severe shortcomings: low measurement point density, long measurement time, risk of surface damage, etc. Indeed, the measurement time rapidly increases with the object complexity and with the density of measurement points. In this paper, we have developed a method for surface topography measurements called 'frequency sweeping digital holography' (FSDH). Our developed FSDH method is based on the principles of wavelength scanning interferometry. It allows surface topography measurements of objects with a diameter of several hundred of mms and a high axial accuracy reaching 10 mu m. The greatest advantage of the presented FSDH is the fact that the surface topology data are captured in a motionless manner by means of a relatively simple setup. This makes the FSDH method a suitable technique for topography measurements of objects with complex geometries made of common materials (such as metals, plastics, etc.), as well as for the characterization of complex composite structures such as acoustic metamaterials, active acoustic metasurfaces, etc. Measurement method principles, setup details, lateral resolution, and axial accuracy are discussed.

Název v anglickém jazyce

Surface topography measurement by frequency sweeping digital holography.

Popis výsledku anglicky

High-precision measurements of mechanical parts' surface topography represent an essential task in many industry sectors. Examples of such tasks are, e.g., precise alignments of opto-mechanical systems, large object deformation measurements, evaluation of object shape, and many others. Today, the standard method used for such measurements is based on use of coordinate measuring machines (CMMs). Unfortunately, CMMs have severe shortcomings: low measurement point density, long measurement time, risk of surface damage, etc. Indeed, the measurement time rapidly increases with the object complexity and with the density of measurement points. In this paper, we have developed a method for surface topography measurements called 'frequency sweeping digital holography' (FSDH). Our developed FSDH method is based on the principles of wavelength scanning interferometry. It allows surface topography measurements of objects with a diameter of several hundred of mms and a high axial accuracy reaching 10 mu m. The greatest advantage of the presented FSDH is the fact that the surface topology data are captured in a motionless manner by means of a relatively simple setup. This makes the FSDH method a suitable technique for topography measurements of objects with complex geometries made of common materials (such as metals, plastics, etc.), as well as for the characterization of complex composite structures such as acoustic metamaterials, active acoustic metasurfaces, etc. Measurement method principles, setup details, lateral resolution, and axial accuracy are discussed.

Druh

J_imp - Článek v periodiku v databázi Web of Science

CEP obor

—

OECD FORD obor

20201 - Electrical and electronic engineering

Projekt

Výsledek vznikl pri realizaci vícero projektů. Více informací v záložce Projekty.

Návaznosti

P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)

Rok uplatnění

2017

Kód důvěrnosti údajů

S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Název periodika

Applied Optics

ISSN

1559-128X

e-ISSN

—

Svazek periodika

56

Číslo periodika v rámci svazku

28

Stát vydavatele periodika

US - Spojené státy americké

Počet stran výsledku

7

Strana od-do

7808-7814

Kód UT WoS článku

000412053200006

EID výsledku v databázi Scopus

2-s2.0-85030027833