Plasma abatement of perfluorinated compounds

Kód výsledku v IS VaVaI

<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F61389021%3A_____%2F19%3A00506390" target="_blank" >RIV/61389021:_____/19:00506390 - isvavai.cz</a>

Výsledek na webu

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DOI - Digital Object Identifier

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Jazyk výsledku

angličtina

Název v původním jazyce

Plasma abatement of perfluorinated compounds

Popis výsledku v původním jazyce

Perfluorinated compounds (PFCs) are widely utilized industrial gases, including electronic semiconductor etchants, refrigerants and inert media for power switch gears (sulphur hexafluoride, SF6). These gases are potent source of global warming effect. Because of extremely high stability of PCFs only very high temperature as provided by plasma is effective for their destruction. Water and gas stabilized DC-plasma torch for generating thermal steam plasma has been already used for efficient abatement of CF4, and this work is going on to abate SF6. The experiments were carried out at 20 kW and 40 kW of torch power. The highest destruction efficiency was attained in the mixture at 40 kW of torch power for which the complete removal was attained even for concentration >15% in argon. An effect of additional gas as a reaction agent was also observed for both CF4 and SF6. It was found the certain addition of hydrogen enhances the destruction efficiency.

Název v anglickém jazyce

Plasma abatement of perfluorinated compounds

Popis výsledku anglicky

Perfluorinated compounds (PFCs) are widely utilized industrial gases, including electronic semiconductor etchants, refrigerants and inert media for power switch gears (sulphur hexafluoride, SF6). These gases are potent source of global warming effect. Because of extremely high stability of PCFs only very high temperature as provided by plasma is effective for their destruction. Water and gas stabilized DC-plasma torch for generating thermal steam plasma has been already used for efficient abatement of CF4, and this work is going on to abate SF6. The experiments were carried out at 20 kW and 40 kW of torch power. The highest destruction efficiency was attained in the mixture at 40 kW of torch power for which the complete removal was attained even for concentration >15% in argon. An effect of additional gas as a reaction agent was also observed for both CF4 and SF6. It was found the certain addition of hydrogen enhances the destruction efficiency.

Druh

D - Stať ve sborníku

CEP obor

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OECD FORD obor

10305 - Fluids and plasma physics (including surface physics)

Projekt

<a href="/cs/project/GC17-10246J" target="_blank" >GC17-10246J: Rozklad perfluorovaných sloučenin a fluorovaných látek ztenčujících ozónovou vrstvu v proudu termického plazmatu</a><br>

Návaznosti

I - Institucionalni podpora na dlouhodoby koncepcni rozvoj vyzkumne organizace

Rok uplatnění

2019

Kód důvěrnosti údajů

S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Název statě ve sborníku

8th Central European Symposium on Plasma Chemistry

ISBN

978-961-94716-0-9

ISSN

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e-ISSN

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Počet stran výsledku

1

Strana od-do

78-78

Název nakladatele

Plasmadis

Místo vydání

Ljubljana

Místo konání akce

Gozd Martuljek

Datum konání akce

26. 5. 2019

Typ akce podle státní příslušnosti

WRD - Celosvětová akce

Kód UT WoS článku

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