Effect of deposition temperature on the tribo-mechanical properties of nitrogen doped DLC thin film

Kód výsledku v IS VaVaI

<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F61989100%3A27230%2F24%3A10254552" target="_blank" >RIV/61989100:27230/24:10254552 - isvavai.cz</a>

Výsledek na webu

<a href="https://www.webofscience.com/wos/woscc/full-record/WOS:001176135900001" target="_blank" >https://www.webofscience.com/wos/woscc/full-record/WOS:001176135900001</a>

DOI - Digital Object Identifier

<a href="http://dx.doi.org/10.3389/fmech.2024.1365555" target="_blank" >10.3389/fmech.2024.1365555</a>

Jazyk výsledku

angličtina

Název v původním jazyce

Effect of deposition temperature on the tribo-mechanical properties of nitrogen doped DLC thin film

Popis výsledku v původním jazyce

The tribomechanical characteristics of diamond-like carbon (DLC) coatings are notably superior to other hard coatings, making them highly desirable for industrial applications. This study focuses on the synthesis of nitrogen-doped DLC (N-DLC) films through chemical vapor deposition (CVD) methods, with an emphasis on varying the deposition temperature. Comprehensive characterization techniques such as atomic force microscopy (AFM), scanning electron microscopy (SEM), and nanoindentation were employed to investigate the morphological and mechanical attributes of these coatings. The thickness of the films, measured using a Dektak profilometer, demonstrated an increase from 1.9 to 2.8 mu m as the deposition temperature rose. Nanoindentation testing revealed that the film deposited at 900 degrees C exhibited the highest hardness (H) and modulus of elasticity (E), measuring 21.95 and 208.3 GPa, respectively. Conversely, the film deposited at 1,000 degrees C showed the lowest values, with H and E at 14.23a and 141.9 GPa, respectively. The H/E ratio of the coatings initially rose from 0.096 to 0.106 as the deposition temperature increased from 800 degrees C to 900 degrees C. However, for deposition temperatures exceeding 900 degrees C the H/E ratio began to decline.

Název v anglickém jazyce

Effect of deposition temperature on the tribo-mechanical properties of nitrogen doped DLC thin film

Popis výsledku anglicky

The tribomechanical characteristics of diamond-like carbon (DLC) coatings are notably superior to other hard coatings, making them highly desirable for industrial applications. This study focuses on the synthesis of nitrogen-doped DLC (N-DLC) films through chemical vapor deposition (CVD) methods, with an emphasis on varying the deposition temperature. Comprehensive characterization techniques such as atomic force microscopy (AFM), scanning electron microscopy (SEM), and nanoindentation were employed to investigate the morphological and mechanical attributes of these coatings. The thickness of the films, measured using a Dektak profilometer, demonstrated an increase from 1.9 to 2.8 mu m as the deposition temperature rose. Nanoindentation testing revealed that the film deposited at 900 degrees C exhibited the highest hardness (H) and modulus of elasticity (E), measuring 21.95 and 208.3 GPa, respectively. Conversely, the film deposited at 1,000 degrees C showed the lowest values, with H and E at 14.23a and 141.9 GPa, respectively. The H/E ratio of the coatings initially rose from 0.096 to 0.106 as the deposition temperature increased from 800 degrees C to 900 degrees C. However, for deposition temperatures exceeding 900 degrees C the H/E ratio began to decline.

Druh

J_imp - Článek v periodiku v databázi Web of Science

CEP obor

—

OECD FORD obor

20300 - Mechanical engineering

Projekt

—

Návaznosti

S - Specificky vyzkum na vysokych skolach

Rok uplatnění

2024

Kód důvěrnosti údajů

S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Název periodika

Frontiers in Mechanical Engineering - Switzerland

ISSN

2297-3079

e-ISSN

2297-3079

Svazek periodika

10

Číslo periodika v rámci svazku

FEB 21 2024

Stát vydavatele periodika

CH - Švýcarská konfederace

Počet stran výsledku

8

Strana od-do

—

Kód UT WoS článku

001176135900001

EID výsledku v databázi Scopus

—