Guided-mode resonance based humidity sensing using a multilayer dielectric structure

Kód výsledku v IS VaVaI

<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F61989100%3A27240%2F20%3A10245817" target="_blank" >RIV/61989100:27240/20:10245817 - isvavai.cz</a>

Výsledek na webu

<a href="https://www.osapublishing.org/oe/fulltext.cfm?uri=oe-28-20-28954&id=439687" target="_blank" >https://www.osapublishing.org/oe/fulltext.cfm?uri=oe-28-20-28954&id=439687</a>

DOI - Digital Object Identifier

<a href="http://dx.doi.org/10.1364/OE.399816" target="_blank" >10.1364/OE.399816</a>

Jazyk výsledku

angličtina

Název v původním jazyce

Guided-mode resonance based humidity sensing using a multilayer dielectric structure

Popis výsledku v původním jazyce

We report on a highly sensitive measurement of the relative humidity of air, which utilizes a guided-mode resonance (GMR) of a multilayer dielectric structure (MDS) and the spectral interference of s- and p-polarized waves reflected from the MDS. We employ the MDS represented by four bilayers of TiO2/SiO2 with a termination layer of TiO2 and demonstrate that the GMR shows up as a shallow and asymmetric dip. The GMR enables us to measure the relative humidity (RH) of air with sensitivities of 0.031-0.114 nm/%R.H. In addition, by employing a birefringent crystal of mica, which modifies the phase difference between the polarized waves, the GMR is transformed into the resonance with a sharp dip, and the measured sensitivity is enhanced to 0.120 nm/%RH at 81 %RH. We also determined the sensitivity to the refractive index and the figure of merit as high as 8000 nm/refractive index unit (RIU) and 702 RIU-1, respectively. The results demonstrate that the GMR based sensor employing the MDS and the spectral interference of polarized waves with their phase difference appropriately adjusted enables a highly sensitive, hysteresis-free humidity measurement, characterized by a high FOM. Humidity sensors employing dielectric multilayers thus represent an effective alternative to available sensors, with advantages such as better mechanical and chemical stability.

Název v anglickém jazyce

Guided-mode resonance based humidity sensing using a multilayer dielectric structure

Popis výsledku anglicky

We report on a highly sensitive measurement of the relative humidity of air, which utilizes a guided-mode resonance (GMR) of a multilayer dielectric structure (MDS) and the spectral interference of s- and p-polarized waves reflected from the MDS. We employ the MDS represented by four bilayers of TiO2/SiO2 with a termination layer of TiO2 and demonstrate that the GMR shows up as a shallow and asymmetric dip. The GMR enables us to measure the relative humidity (RH) of air with sensitivities of 0.031-0.114 nm/%R.H. In addition, by employing a birefringent crystal of mica, which modifies the phase difference between the polarized waves, the GMR is transformed into the resonance with a sharp dip, and the measured sensitivity is enhanced to 0.120 nm/%RH at 81 %RH. We also determined the sensitivity to the refractive index and the figure of merit as high as 8000 nm/refractive index unit (RIU) and 702 RIU-1, respectively. The results demonstrate that the GMR based sensor employing the MDS and the spectral interference of polarized waves with their phase difference appropriately adjusted enables a highly sensitive, hysteresis-free humidity measurement, characterized by a high FOM. Humidity sensors employing dielectric multilayers thus represent an effective alternative to available sensors, with advantages such as better mechanical and chemical stability.

Druh

J_imp - Článek v periodiku v databázi Web of Science

CEP obor

—

OECD FORD obor

10306 - Optics (including laser optics and quantum optics)

Projekt

—

Návaznosti

S - Specificky vyzkum na vysokych skolach

Rok uplatnění

2020

Kód důvěrnosti údajů

S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Název periodika

Optics Express

ISSN

1094-4087

e-ISSN

—

Svazek periodika

28

Číslo periodika v rámci svazku

20

Stát vydavatele periodika

US - Spojené státy americké

Počet stran výsledku

7

Strana od-do

28954-28960

Kód UT WoS článku

000581074800019

EID výsledku v databázi Scopus

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