Guided-Mode Resonance-Based Relative Humidity Sensing Employing a Planar Waveguide Structure
Identifikátory výsledku
Kód výsledku v IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F61989100%3A27240%2F20%3A10246157" target="_blank" >RIV/61989100:27240/20:10246157 - isvavai.cz</a>
Výsledek na webu
<a href="https://www.mdpi.com/1424-8220/20/23/6788" target="_blank" >https://www.mdpi.com/1424-8220/20/23/6788</a>
DOI - Digital Object Identifier
<a href="http://dx.doi.org/10.3390/s20236788" target="_blank" >10.3390/s20236788</a>
Alternativní jazyky
Jazyk výsledku
angličtina
Název v původním jazyce
Guided-Mode Resonance-Based Relative Humidity Sensing Employing a Planar Waveguide Structure
Popis výsledku v původním jazyce
In this paper, we present a new type of guided-mode resonance (GMR)-based sensor that utilizes a planar waveguide structure (PWS). We employed a PWS with an asymmetric three-layer waveguide structure consisting of substrate/Au/photoresist. The ellipsometric characterization of the structure layers, the simulated reflectance spectra, and optical field distributions under GMR conditions showed that multiple waveguide modes can be excited in the PWS. These modes can be used for refractive index sensing, and the theoretical analysis of the designed PWS showed a sensitivity to the refractive index up to 6600 nm per refractive index unit (RIU) and a figure of merit (FOM) up to 224 RIU-1. In response to these promising theoretical results, the PWS was used to measure the relative humidity (RH) of moist air with a sensitivity up to 0.141 nm/%RH and a FOM reaching 3.7 x 10(-3)%RH-1. The results demonstrate that this highly-sensitive and hysteresis-free sensor based on GMR has the potential to be used in a wide range of applications.
Název v anglickém jazyce
Guided-Mode Resonance-Based Relative Humidity Sensing Employing a Planar Waveguide Structure
Popis výsledku anglicky
In this paper, we present a new type of guided-mode resonance (GMR)-based sensor that utilizes a planar waveguide structure (PWS). We employed a PWS with an asymmetric three-layer waveguide structure consisting of substrate/Au/photoresist. The ellipsometric characterization of the structure layers, the simulated reflectance spectra, and optical field distributions under GMR conditions showed that multiple waveguide modes can be excited in the PWS. These modes can be used for refractive index sensing, and the theoretical analysis of the designed PWS showed a sensitivity to the refractive index up to 6600 nm per refractive index unit (RIU) and a figure of merit (FOM) up to 224 RIU-1. In response to these promising theoretical results, the PWS was used to measure the relative humidity (RH) of moist air with a sensitivity up to 0.141 nm/%RH and a FOM reaching 3.7 x 10(-3)%RH-1. The results demonstrate that this highly-sensitive and hysteresis-free sensor based on GMR has the potential to be used in a wide range of applications.
Klasifikace
Druh
J<sub>imp</sub> - Článek v periodiku v databázi Web of Science
CEP obor
—
OECD FORD obor
10306 - Optics (including laser optics and quantum optics)
Návaznosti výsledku
Projekt
<a href="/cs/project/EF17_048%2F0007399" target="_blank" >EF17_048/0007399: Nové kompozitní materiály pro environmentální aplikace</a><br>
Návaznosti
P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)<br>S - Specificky vyzkum na vysokych skolach
Ostatní
Rok uplatnění
2020
Kód důvěrnosti údajů
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů
Údaje specifické pro druh výsledku
Název periodika
Sensors
ISSN
1424-3210
e-ISSN
—
Svazek periodika
20
Číslo periodika v rámci svazku
23
Stát vydavatele periodika
CH - Švýcarská konfederace
Počet stran výsledku
13
Strana od-do
"6788(1)"-"6788(13)"
Kód UT WoS článku
000597457600001
EID výsledku v databázi Scopus
—