Diffractive order Mueller matrix ellipsometry for the design and manufacture of polarization beam splitting metasurfaces

Kód výsledku v IS VaVaI

<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F61989100%3A27360%2F24%3A10253526" target="_blank" >RIV/61989100:27360/24:10253526 - isvavai.cz</a>

Nalezeny alternativní kódy

RIV/61989100:27640/24:10253526 RIV/61989100:27740/24:10253526

Výsledek na webu

<a href="https://opg.optica.org/oe/fulltext.cfm?uri=oe-32-1-703&id=544777" target="_blank" >https://opg.optica.org/oe/fulltext.cfm?uri=oe-32-1-703&id=544777</a>

DOI - Digital Object Identifier

<a href="http://dx.doi.org/10.1364/OE.501709" target="_blank" >10.1364/OE.501709</a>

Jazyk výsledku

angličtina

Název v původním jazyce

Diffractive order Mueller matrix ellipsometry for the design and manufacture of polarization beam splitting metasurfaces

Popis výsledku v původním jazyce

Optical metasurface technology promises an important potential for replacing bulkytraditional optical components, in addition to enabling new compact and lightweight metasurfacebased devices. Since even subtle imperfections in metasurface design or manufacture stronglyaffect their performance, there is an urgent need to develop proper and accurate protocols for theircharacterization, allowing for efficient control of the fabrication. We present non-destructivespectroscopic Mueller matrix ellipsometry in an uncommon off-specular configuration as apowerful tool for the characterization of orthogonal polarization beam-splitters based on a-Si:Hnanopillars. Through Mueller matrix analysis, the spectroscopic polarimetric performance ofthe +-1 diffraction orders is experimentally demonstrated. This reveals a wavelength shift inthe maximum efficiency caused by fabrication-induced conical pillars while still maintaininga polarimetric response close to ideal non-depolarizing Mueller matrices. We highlight theadvantage of the spectroscopic Mueller matrix approach, which not only allows for monitoringand control of the fabrication process itself, but also verifies the initial design and producesfeedback into the computational design.

Název v anglickém jazyce

Diffractive order Mueller matrix ellipsometry for the design and manufacture of polarization beam splitting metasurfaces

Popis výsledku anglicky

Optical metasurface technology promises an important potential for replacing bulkytraditional optical components, in addition to enabling new compact and lightweight metasurfacebased devices. Since even subtle imperfections in metasurface design or manufacture stronglyaffect their performance, there is an urgent need to develop proper and accurate protocols for theircharacterization, allowing for efficient control of the fabrication. We present non-destructivespectroscopic Mueller matrix ellipsometry in an uncommon off-specular configuration as apowerful tool for the characterization of orthogonal polarization beam-splitters based on a-Si:Hnanopillars. Through Mueller matrix analysis, the spectroscopic polarimetric performance ofthe +-1 diffraction orders is experimentally demonstrated. This reveals a wavelength shift inthe maximum efficiency caused by fabrication-induced conical pillars while still maintaininga polarimetric response close to ideal non-depolarizing Mueller matrices. We highlight theadvantage of the spectroscopic Mueller matrix approach, which not only allows for monitoringand control of the fabrication process itself, but also verifies the initial design and producesfeedback into the computational design.

Druh

J_imp - Článek v periodiku v databázi Web of Science

CEP obor

—

OECD FORD obor

10300 - Physical sciences

Projekt

<a href="/cs/project/EF16_013%2F0001791" target="_blank" >EF16_013/0001791: IT4Innovations národní superpočítačové centrum - cesta k exascale</a><br>

Návaznosti

P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)

Rok uplatnění

2024

Kód důvěrnosti údajů

S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Název periodika

Optics Express

ISSN

1094-4087

e-ISSN

—

Svazek periodika

32

Číslo periodika v rámci svazku

1

Stát vydavatele periodika

US - Spojené státy americké

Počet stran výsledku

19

Strana od-do

703-721

Kód UT WoS článku

001171156400001

EID výsledku v databázi Scopus

2-s2.0-85181401567