Tribological properties of magnetron sputtered amorphous silicon carbide and silicon carbonitride coatings

Kód výsledku v IS VaVaI

<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F61989592%3A15310%2F16%3A33161923" target="_blank" >RIV/61989592:15310/16:33161923 - isvavai.cz</a>

Výsledek na webu

<a href="https://www.scientific.net/DDF.368.91" target="_blank" >https://www.scientific.net/DDF.368.91</a>

DOI - Digital Object Identifier

<a href="http://dx.doi.org/10.4028/www.scientific.net/DDF.368.91" target="_blank" >10.4028/www.scientific.net/DDF.368.91</a>

Jazyk výsledku

angličtina

Název v původním jazyce

Tribological properties of magnetron sputtered amorphous silicon carbide and silicon carbonitride coatings

Popis výsledku v původním jazyce

The tribological properties of magnetron sputtered amorphous silicon carbide (a-SiC) and silicon carbonitride coatings (a-SiCN) with thickness of 2.2 and 3.4 μm were investigated. Samples were additionally annealed at temperature of 700°C or 900°C in air. Progressive load scratch tests were performed on the annealed samples as well as on the as deposited ones. An acoustic emission signal was detected during all tests using the sample holder with embedded sensor of our own design. Results indicate no change in wear resistance of SiCN sample after high temperature exposure up to 900°C, unlike in the tests of SiC coatings. Detection of acoustic emission generated during the scratch test proved to be a significant improvement for the coating evaluation.

Název v anglickém jazyce

Tribological properties of magnetron sputtered amorphous silicon carbide and silicon carbonitride coatings

Popis výsledku anglicky

The tribological properties of magnetron sputtered amorphous silicon carbide (a-SiC) and silicon carbonitride coatings (a-SiCN) with thickness of 2.2 and 3.4 μm were investigated. Samples were additionally annealed at temperature of 700°C or 900°C in air. Progressive load scratch tests were performed on the annealed samples as well as on the as deposited ones. An acoustic emission signal was detected during all tests using the sample holder with embedded sensor of our own design. Results indicate no change in wear resistance of SiCN sample after high temperature exposure up to 900°C, unlike in the tests of SiC coatings. Detection of acoustic emission generated during the scratch test proved to be a significant improvement for the coating evaluation.

Druh

D - Stať ve sborníku

CEP obor

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OECD FORD obor

20504 - Ceramics

Projekt

—

Návaznosti

S - Specificky vyzkum na vysokych skolach

Rok uplatnění

2016

Kód důvěrnosti údajů

S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Název statě ve sborníku

Local Mechanical Properties

ISBN

978-3-03835-720-9

ISSN

1012-0386

e-ISSN

—

Počet stran výsledku

4

Strana od-do

91-94

Název nakladatele

Trans Tech Publications

Místo vydání

Zurich

Místo konání akce

Liberec

Datum konání akce

4. 11. 2015

Typ akce podle státní příslušnosti

WRD - Celosvětová akce

Kód UT WoS článku

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