Mechanical properties of amorphous silicon carbonitride thin films at elevated temperatures

Kód výsledku v IS VaVaI

<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F61989592%3A15310%2F15%3A33154106" target="_blank" >RIV/61989592:15310/15:33154106 - isvavai.cz</a>

Nalezeny alternativní kódy

RIV/68378271:_____/15:00510824

Výsledek na webu

<a href="http://link.springer.com/article/10.1007%2Fs10853-014-8715-0" target="_blank" >http://link.springer.com/article/10.1007%2Fs10853-014-8715-0</a>

DOI - Digital Object Identifier

<a href="http://dx.doi.org/10.1007/s10853-014-8715-0" target="_blank" >10.1007/s10853-014-8715-0</a>

Jazyk výsledku

angličtina

Název v původním jazyce

Mechanical properties of amorphous silicon carbonitride thin films at elevated temperatures

Popis výsledku v původním jazyce

The mechanical properties of amorphous silicon carbonitride (a-SiC (x) N (y) ) films with various nitrogen content (y = 0-40 at.%) were investigated in situ at elevated temperatures up to 650 A degrees C in inert atmosphere. A SiC film was measured alsoat 700 A degrees C in air. The hardness and elastic modulus were evaluated using instrumented nanoindentation with thermally stable cubic boron nitride Berkovich indenter. Both the sample and the indenter were separately heated during the experiments totemperatures of 300, 500, and 650 A degrees C. Short duration high temperature creep tests (1200 s) of the films were also carried out. The results revealed that the room temperature hardness and elastic modulus deteriorate with the increase of the nitrogen content. Furthermore, the hardness of both the a-SiC and the a-SiCN films with lower nitrogen content at 300 A degrees C drops to approx. 77 % of the corresponding room temperature values, while it reduces to 69 % for the a-SiCN film

Název v anglickém jazyce

Mechanical properties of amorphous silicon carbonitride thin films at elevated temperatures

Popis výsledku anglicky

The mechanical properties of amorphous silicon carbonitride (a-SiC (x) N (y) ) films with various nitrogen content (y = 0-40 at.%) were investigated in situ at elevated temperatures up to 650 A degrees C in inert atmosphere. A SiC film was measured alsoat 700 A degrees C in air. The hardness and elastic modulus were evaluated using instrumented nanoindentation with thermally stable cubic boron nitride Berkovich indenter. Both the sample and the indenter were separately heated during the experiments totemperatures of 300, 500, and 650 A degrees C. Short duration high temperature creep tests (1200 s) of the films were also carried out. The results revealed that the room temperature hardness and elastic modulus deteriorate with the increase of the nitrogen content. Furthermore, the hardness of both the a-SiC and the a-SiCN films with lower nitrogen content at 300 A degrees C drops to approx. 77 % of the corresponding room temperature values, while it reduces to 69 % for the a-SiCN film

Druh

J_x - Nezařazeno - Článek v odborném periodiku (Jimp, Jsc a Jost)

CEP obor

JH - Keramika, žáruvzdorné materiály a skla

OECD FORD obor

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Projekt

<a href="/cs/project/LO1305" target="_blank" >LO1305: Rozvoj centra pokročilých technologií a materiálů</a><br>

Návaznosti

P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)

Rok uplatnění

2015

Kód důvěrnosti údajů

S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Název periodika

Journal of Materials Science

ISSN

0022-2461

e-ISSN

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Svazek periodika

50

Číslo periodika v rámci svazku

4

Stát vydavatele periodika

US - Spojené státy americké

Počet stran výsledku

12

Strana od-do

1553-1564

Kód UT WoS článku

000346898800004

EID výsledku v databázi Scopus

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