Mechanical properties of amorphous silicon carbonitride thin films at elevated temperatures

Kód výsledku v IS VaVaI

<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F68378271%3A_____%2F15%3A00510824" target="_blank" >RIV/68378271:_____/15:00510824 - isvavai.cz</a>

Nalezeny alternativní kódy

RIV/61989592:15310/15:33154106

Výsledek na webu

<a href="https://doi.org/10.1007/s10853-014-8715-0" target="_blank" >https://doi.org/10.1007/s10853-014-8715-0</a>

DOI - Digital Object Identifier

<a href="http://dx.doi.org/10.1007/s10853-014-8715-0" target="_blank" >10.1007/s10853-014-8715-0</a>

Jazyk výsledku

angličtina

Název v původním jazyce

Mechanical properties of amorphous silicon carbonitride thin films at elevated temperatures

Popis výsledku v původním jazyce

The mechanical properties of amorphous silicon carbonitride (a-SiCx Ny ) films with various nitrogen content (y = 0–40 at.%) were investigated in situ at elevated temperatures up to 650 °C in inert atmosphere. A SiC film was measured also at 700 °C in air. The hardness and elastic modulus were evaluated using instrumented nanoindentation with thermally stable cubic boron nitride Berkovich indenter. Both the sample and the indenter were separately heated during the experiments to temperatures of 300, 500, and 650 °C. Short duration high temperature creep tests (1200 s) of the films were also carried out. The results revealed that the room temperature hardness and elastic modulus deteriorate with the increase of the nitrogen content.

Název v anglickém jazyce

Mechanical properties of amorphous silicon carbonitride thin films at elevated temperatures

Popis výsledku anglicky

The mechanical properties of amorphous silicon carbonitride (a-SiCx Ny ) films with various nitrogen content (y = 0–40 at.%) were investigated in situ at elevated temperatures up to 650 °C in inert atmosphere. A SiC film was measured also at 700 °C in air. The hardness and elastic modulus were evaluated using instrumented nanoindentation with thermally stable cubic boron nitride Berkovich indenter. Both the sample and the indenter were separately heated during the experiments to temperatures of 300, 500, and 650 °C. Short duration high temperature creep tests (1200 s) of the films were also carried out. The results revealed that the room temperature hardness and elastic modulus deteriorate with the increase of the nitrogen content.

Druh

J_imp - Článek v periodiku v databázi Web of Science

CEP obor

—

OECD FORD obor

10302 - Condensed matter physics (including formerly solid state physics, supercond.)

Projekt

—

Návaznosti

I - Institucionalni podpora na dlouhodoby koncepcni rozvoj vyzkumne organizace

Rok uplatnění

2015

Kód důvěrnosti údajů

S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Název periodika

Journal of Materials Science

ISSN

0022-2461

e-ISSN

—

Svazek periodika

50

Číslo periodika v rámci svazku

4

Stát vydavatele periodika

US - Spojené státy americké

Počet stran výsledku

12

Strana od-do

1553-1564

Kód UT WoS článku

000346898800004

EID výsledku v databázi Scopus

2-s2.0-84988281424