Method and system for plasma diagnostics

Kód výsledku v IS VaVaI

<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F61989592%3A15310%2F25%3A73634591" target="_blank" >RIV/61989592:15310/25:73634591 - isvavai.cz</a>

Nalezeny alternativní kódy

RIV/68378271:_____/25:00619663

Výsledek na webu

<a href="https://worldwide.espacenet.com/publicationDetails/originalDocument?FT=D&date=20250219&DB=&locale=en_EP&CC=EP&NR=4416753B1&KC=B1&ND=4" target="_blank" >https://worldwide.espacenet.com/publicationDetails/originalDocument?FT=D&date=20250219&DB=&locale=en_EP&CC=EP&NR=4416753B1&KC=B1&ND=4</a>

DOI - Digital Object Identifier

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Jazyk výsledku

angličtina

Název v původním jazyce

Method and system for plasma diagnostics

Popis výsledku v původním jazyce

The above-mentioned disadvantages of the prior art are at least partially solved by a method of plasma diagnostics, according to claim 1, in which an alternating voltage of frequency f in the range of values of 0.01‑100 MHz is applied to a reference electrode. The reference electrode has a measurable and well-defned areaAAP, it is located in a discharge chamber and in contact with the plasma excited in the discharge chamber.Afrst set of waveforms of electric current and voltage on the reference electrode corresponding to the current and voltage values measured on the electrode over a certain time interval is created, e.g., to obtain the time and volt-ampere characteristics of the reference probe. After the creation of the frst set of values, the supply of voltage to the reference electrode is terminated.Subsequently, a second set of values is created, which is created from the frst set of values by subtracting the parasitic current and voltage values, thereby obtaining the time and volt-ampere characteristics of the reference electrode without the infuence of parasitic values. From the second set of values, the value of the diferential conductivity YAP and the diferential capacity of the reference electrode in the region of the foating potential of the plasma is determined, or for values close to the value of the foating potential of the plasma with error 20%, e.g., by calculation of the tangent of dependence, direct calculation or direct measurement. In the next step, an alternating voltage of the same frequency is applied to the main electrode. The main electrode is also located in the discharge chamber and is in contact with the plasma. It is preferably designed as a planar electrode, e.g., rectangular or square. It is heterogeneously covered by a dielectric of an unknown dielectric constant, so it is not possible to accurately determine its surface and roughness by conventional measurement method. The roughness varies in diferent places, the thickness of the dielectric and its composition is not homogeneous. By measurement of RF voltage and current on the main electrode, a third set of waveforms of electric current and voltage on the main electrode over a certain time interval is created, e.g., in order to obtain time and volt-ampere characteristics of the main electrode. Afterthe creation of the third set of values, the supply of voltage to the main electrode is terminated.Subsequently, a fourth set of values is created, which is formed from the third set of values by subtracting the parasitic values of current and voltage waveforms, thus obtaining the time and volt-ampere characteristics of the main electrode without the infuence of undesired values.

Název v anglickém jazyce

Method and system for plasma diagnostics

Popis výsledku anglicky

The above-mentioned disadvantages of the prior art are at least partially solved by a method of plasma diagnostics, according to claim 1, in which an alternating voltage of frequency f in the range of values of 0.01‑100 MHz is applied to a reference electrode. The reference electrode has a measurable and well-defned areaAAP, it is located in a discharge chamber and in contact with the plasma excited in the discharge chamber.Afrst set of waveforms of electric current and voltage on the reference electrode corresponding to the current and voltage values measured on the electrode over a certain time interval is created, e.g., to obtain the time and volt-ampere characteristics of the reference probe. After the creation of the frst set of values, the supply of voltage to the reference electrode is terminated.Subsequently, a second set of values is created, which is created from the frst set of values by subtracting the parasitic current and voltage values, thereby obtaining the time and volt-ampere characteristics of the reference electrode without the infuence of parasitic values. From the second set of values, the value of the diferential conductivity YAP and the diferential capacity of the reference electrode in the region of the foating potential of the plasma is determined, or for values close to the value of the foating potential of the plasma with error 20%, e.g., by calculation of the tangent of dependence, direct calculation or direct measurement. In the next step, an alternating voltage of the same frequency is applied to the main electrode. The main electrode is also located in the discharge chamber and is in contact with the plasma. It is preferably designed as a planar electrode, e.g., rectangular or square. It is heterogeneously covered by a dielectric of an unknown dielectric constant, so it is not possible to accurately determine its surface and roughness by conventional measurement method. The roughness varies in diferent places, the thickness of the dielectric and its composition is not homogeneous. By measurement of RF voltage and current on the main electrode, a third set of waveforms of electric current and voltage on the main electrode over a certain time interval is created, e.g., in order to obtain time and volt-ampere characteristics of the main electrode. Afterthe creation of the third set of values, the supply of voltage to the main electrode is terminated.Subsequently, a fourth set of values is created, which is formed from the third set of values by subtracting the parasitic values of current and voltage waveforms, thus obtaining the time and volt-ampere characteristics of the main electrode without the infuence of undesired values.

Druh

P - Patent

CEP obor

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OECD FORD obor

10305 - Fluids and plasma physics (including surface physics)

Projekt

Výsledek vznikl pri realizaci vícero projektů. Více informací v záložce Projekty.

Návaznosti

P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)

Rok uplatnění

2025

Kód důvěrnosti údajů

C - Předmět řešení projektu podléhá obchodnímu tajemství (§ 504 Občanského zákoníku), ale název projektu, cíle projektu a u ukončeného nebo zastaveného projektu zhodnocení výsledku řešení projektu (údaje P03, P04, P15, P19, P29, PN8) dodané do CEP, jsou upraveny tak, aby byly zveřejnitelné.

Číslo patentu nebo vzoru

EP4416753B1

Vydavatel

EPO_1 -

Název vydavatele

European Patent Office

Místo vydání

Munich, The Hague, Berlin, Vienna, Brussels

Stát vydání

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Datum přijetí

19. 2. 2025

Název vlastníka

Univerzita Palackého v Olomouci, Fyzikální ústav AV ČR v.v.i.

Způsob využití

A - Výsledek využívá pouze poskytovatel

Druh možnosti využití

A - K využití výsledku jiným subjektem je vždy nutné nabytí licence