TEM study of nanocomposite TiC/a-C:H coating prepared by balanced magnetron sputtering

Kód výsledku v IS VaVaI

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Výsledek na webu

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DOI - Digital Object Identifier

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Jazyk výsledku

angličtina

Název v původním jazyce

TEM study of nanocomposite TiC/a-C:H coating prepared by balanced magnetron sputtering

Popis výsledku v původním jazyce

Composites have often desirable combinations of properties that are not found in the individual components. Nanocrastaline titanium carbide embedded in an hydrogenated amorphous carbon matrix (nc-TiC/a-C:H) shows high hardness and Young's modulus together with low wear and low friction coefficient . These coatings are usually deposited by the hybrid PVD-PECVD process using the unbalanced of even the close-field unbalanced magnetic field configuration in order to enhance the ion bombardment of the growing film. The thickness of these coatings ranges typically from several hundreds of nm up to 3?m. The aim of the recent work was to prepare well adherent nc- TiC/a -C:H coatings about 5?m thick on various substrates using a well balanced magnetic field configuration and only very low power RF bias on the substrate.

Název v anglickém jazyce

TEM study of nanocomposite TiC/a-C:H coating prepared by balanced magnetron sputtering

Popis výsledku anglicky

Composites have often desirable combinations of properties that are not found in the individual components. Nanocrastaline titanium carbide embedded in an hydrogenated amorphous carbon matrix (nc-TiC/a-C:H) shows high hardness and Young's modulus together with low wear and low friction coefficient . These coatings are usually deposited by the hybrid PVD-PECVD process using the unbalanced of even the close-field unbalanced magnetic field configuration in order to enhance the ion bombardment of the growing film. The thickness of these coatings ranges typically from several hundreds of nm up to 3?m. The aim of the recent work was to prepare well adherent nc- TiC/a -C:H coatings about 5?m thick on various substrates using a well balanced magnetic field configuration and only very low power RF bias on the substrate.

Druh

O - Ostatní výsledky

CEP obor

BM - Fyzika pevných látek a magnetismus

OECD FORD obor

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Projekt

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Návaznosti

Z - Vyzkumny zamer (s odkazem do CEZ)

Rok uplatnění

2011

Kód důvěrnosti údajů

S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů