Development of the bulge test equipment for measuring mechanical properties of thin films

Kód výsledku v IS VaVaI

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Nalezeny alternativní kódy

RIV/68081731:_____/17:00494029 RIV/00216305:26620/17:PU137623

Výsledek na webu

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DOI - Digital Object Identifier

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Jazyk výsledku

angličtina

Název v původním jazyce

Development of the bulge test equipment for measuring mechanical properties of thin films

Popis výsledku v původním jazyce

The bulge test apparatus designed for the measurement of mechanical material properties of thin films was constructed and tested. The principle of the test is to apply pressure on a free-standing membrane, to measure the membrane shape and to analyse the results. Commercially available silicon nitride (Si3N4) thin films were used for the testing. It is shown that interferometric set-up designed and assembled for the apparatus enables precise determination of 3D shape of the whole membrane, which allows more precise determination of materials parameters compared to measurement of the height of the center of the membrane only. Fit of an analytical formula gives values of Young modulus and residual stress with very good agreement with the literature data. Moreover, FEM model of the bulged membrane was developed. The main aim of the effort is to enable measurement of plastic properties of a thin film of interest, that will be deposited on the Si3N4 membrane with known properties and bulge test will be performed on the bilayer specimen. Subsequently, the material properties of the thin film will be obtained using FEM analysis.

Název v anglickém jazyce

Development of the bulge test equipment for measuring mechanical properties of thin films

Popis výsledku anglicky

The bulge test apparatus designed for the measurement of mechanical material properties of thin films was constructed and tested. The principle of the test is to apply pressure on a free-standing membrane, to measure the membrane shape and to analyse the results. Commercially available silicon nitride (Si3N4) thin films were used for the testing. It is shown that interferometric set-up designed and assembled for the apparatus enables precise determination of 3D shape of the whole membrane, which allows more precise determination of materials parameters compared to measurement of the height of the center of the membrane only. Fit of an analytical formula gives values of Young modulus and residual stress with very good agreement with the literature data. Moreover, FEM model of the bulged membrane was developed. The main aim of the effort is to enable measurement of plastic properties of a thin film of interest, that will be deposited on the Si3N4 membrane with known properties and bulge test will be performed on the bilayer specimen. Subsequently, the material properties of the thin film will be obtained using FEM analysis.

Druh

D - Stať ve sborníku

CEP obor

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OECD FORD obor

10302 - Condensed matter physics (including formerly solid state physics, supercond.)

Projekt

Výsledek vznikl pri realizaci vícero projektů. Více informací v záložce Projekty.

Návaznosti

I - Institucionalni podpora na dlouhodoby koncepcni rozvoj vyzkumne organizace

Rok uplatnění

2017

Kód důvěrnosti údajů

S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Název statě ve sborníku

METAL 2017. 26th International Conference on Metallurgy and Materials. Conference Proceedings

ISBN

978-80-87294-79-6

ISSN

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e-ISSN

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Počet stran výsledku

6

Strana od-do

1053-1058

Název nakladatele

TANGER

Místo vydání

Ostrava

Místo konání akce

Brno

Datum konání akce

24. 5. 2017

Typ akce podle státní příslušnosti

WRD - Celosvětová akce

Kód UT WoS článku

000434346900168