Computer controlled SEM with Schottky cathode for imaging in slow and Auger electrons.

Kód výsledku v IS VaVaI

<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F68081731%3A_____%2F02%3A12020133" target="_blank" >RIV/68081731:_____/02:12020133 - isvavai.cz</a>

Výsledek na webu

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DOI - Digital Object Identifier

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Jazyk výsledku

angličtina

Název v původním jazyce

Computer controlled SEM with Schottky cathode for imaging in slow and Auger electrons.

Popis výsledku v původním jazyce

The ultrahighvacuum Scanning Electron Microscope has been built using the column of an old prototype (later produced as Tesla BS 350), some spare parts for BS 350 and new components, including computer controlled electronics. The whole vacuum system wasextensively reconstructed, too. The Schottky cathode was introduced into the microscope instead of the original cold field emission gun. The advantage of this system includes a high current density, higher stability and lower vacuum demands at comparableperformance as regards the resolution. Therefore it is possible to practice surface analysis with Auger electrons at a high resolution. The microscope was also adapted to the operation with slow and very slow electrons, again at high resolution, so thatthese two methods can be in situ compared.

Název v anglickém jazyce

Computer controlled SEM with Schottky cathode for imaging in slow and Auger electrons.

Popis výsledku anglicky

The ultrahighvacuum Scanning Electron Microscope has been built using the column of an old prototype (later produced as Tesla BS 350), some spare parts for BS 350 and new components, including computer controlled electronics. The whole vacuum system wasextensively reconstructed, too. The Schottky cathode was introduced into the microscope instead of the original cold field emission gun. The advantage of this system includes a high current density, higher stability and lower vacuum demands at comparableperformance as regards the resolution. Therefore it is possible to practice surface analysis with Auger electrons at a high resolution. The microscope was also adapted to the operation with slow and very slow electrons, again at high resolution, so thatthese two methods can be in situ compared.

Druh

D - Stať ve sborníku

CEP obor

JA - Elektronika a optoelektronika, elektrotechnika

OECD FORD obor

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Projekt

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Návaznosti

Z - Vyzkumny zamer (s odkazem do CEZ)

Rok uplatnění

2002

Kód důvěrnosti údajů

S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Název statě ve sborníku

Proceedings of 8.sup.th./sup. conference EEICT 2002.

ISBN

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ISSN

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e-ISSN

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Počet stran výsledku

5

Strana od-do

"X1"-"X5"

Název nakladatele

FEKT VUT Brno

Místo vydání

Brno

Místo konání akce

Brno [CZ]

Datum konání akce

25. 4. 2002

Typ akce podle státní příslušnosti

EUR - Evropská akce

Kód UT WoS článku

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