Elektrostatický nízkoenergiový rastrovací elektronový mikroskop pro Augerovu analýzu

Kód výsledku v IS VaVaI

<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F68081731%3A_____%2F04%3A00109049" target="_blank" >RIV/68081731:_____/04:00109049 - isvavai.cz</a>

Výsledek na webu

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DOI - Digital Object Identifier

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Jazyk výsledku

angličtina

Název v původním jazyce

Electrostatic Low Energy Scanning Electron Microscope for Auger Analysis

Popis výsledku v původním jazyce

A scanning low energy electron microscope (SLEEM) was realized with a cathode lens in which the negatively biased specimen is used as the cathode. In this arrangement, electrons pass through the microscope at high energy and are decelerated to low energybefore landing on the sample. This design brings plenty of signal even in the landing energy range of tens or units of eV. However, the use of the primary electrons with low energy brings some problems e.g. low source brightness, increased aberrations and sensitivity to stray fields. The scanning Auger microscopy (SAM) is well-established experimental method. A combination of SAM and SLEEM in one device would therefore provide a sufficient tool to solve the problems inherent in these individual methods. Although much has already been achieved in the area of detection of slow electrons, none of the methods currently known is suitable to be built into a scanning illumination column for Auger microprobe analysis

Název v anglickém jazyce

Electrostatic Low Energy Scanning Electron Microscope for Auger Analysis

Popis výsledku anglicky

A scanning low energy electron microscope (SLEEM) was realized with a cathode lens in which the negatively biased specimen is used as the cathode. In this arrangement, electrons pass through the microscope at high energy and are decelerated to low energybefore landing on the sample. This design brings plenty of signal even in the landing energy range of tens or units of eV. However, the use of the primary electrons with low energy brings some problems e.g. low source brightness, increased aberrations and sensitivity to stray fields. The scanning Auger microscopy (SAM) is well-established experimental method. A combination of SAM and SLEEM in one device would therefore provide a sufficient tool to solve the problems inherent in these individual methods. Although much has already been achieved in the area of detection of slow electrons, none of the methods currently known is suitable to be built into a scanning illumination column for Auger microprobe analysis

Druh

D - Stať ve sborníku

CEP obor

JA - Elektronika a optoelektronika, elektrotechnika

OECD FORD obor

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Projekt

<a href="/cs/project/GA202%2F04%2F0281" target="_blank" >GA202/04/0281: Mapování lokální hustoty stavů pomocí odrazu velmi pomalých elektronů při vysokém prostorovém rozlišení</a><br>

Návaznosti

P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)

Rok uplatnění

2004

Kód důvěrnosti údajů

S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Název statě ve sborníku

Proceedings of the 9th International Seminar Recent Trends in Charged Particle Optics and Surface Physics Instrumentation

ISBN

80-239-3246-2

ISSN

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e-ISSN

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Počet stran výsledku

2

Strana od-do

65-66

Název nakladatele

Institute of Scientific Instruments AS CR

Místo vydání

Brno

Místo konání akce

Skalský Dvůr

Datum konání akce

12. 7. 2004

Typ akce podle státní příslušnosti

WRD - Celosvětová akce

Kód UT WoS článku

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