Uncertainties of displacement measurement of nanometrology coordinate measurement machines caused by laser source fluctuations

Kód výsledku v IS VaVaI

<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F68081731%3A_____%2F12%3A00386112" target="_blank" >RIV/68081731:_____/12:00386112 - isvavai.cz</a>

Výsledek na webu

<a href="http://dx.doi.org/10.1117/12.922439" target="_blank" >http://dx.doi.org/10.1117/12.922439</a>

DOI - Digital Object Identifier

<a href="http://dx.doi.org/10.1117/12.922439" target="_blank" >10.1117/12.922439</a>

Jazyk výsledku

angličtina

Název v původním jazyce

Uncertainties of displacement measurement of nanometrology coordinate measurement machines caused by laser source fluctuations

Popis výsledku v původním jazyce

One of considerable sources of displacement measurement uncertainty in nanometrology systems such as multidimensional interferometric positioning for local probe microscopy is the influence of amplitude and especially frequency noise of a laser source which powers the interferometers. We investigated the noise properties of several laser sources suitable for interferometry for micro- and nano-CMMs (coordinate measurement machines) and compared the results with the aim to find the best option. The influences of amplitude and frequency fluctuations were compared together with the noise and uncertainty contributions of other components of the whole measuring system. Frequency noise of investigated laser sources was measured by two approaches - at first with the help of frequency discriminator (Fabry-Perot resonator) converting the frequency (phase) noise into amplitude one and then directly through the measurement of displacement noise at the output of the interferometer fringe detection

Název v anglickém jazyce

Uncertainties of displacement measurement of nanometrology coordinate measurement machines caused by laser source fluctuations

Popis výsledku anglicky

One of considerable sources of displacement measurement uncertainty in nanometrology systems such as multidimensional interferometric positioning for local probe microscopy is the influence of amplitude and especially frequency noise of a laser source which powers the interferometers. We investigated the noise properties of several laser sources suitable for interferometry for micro- and nano-CMMs (coordinate measurement machines) and compared the results with the aim to find the best option. The influences of amplitude and frequency fluctuations were compared together with the noise and uncertainty contributions of other components of the whole measuring system. Frequency noise of investigated laser sources was measured by two approaches - at first with the help of frequency discriminator (Fabry-Perot resonator) converting the frequency (phase) noise into amplitude one and then directly through the measurement of displacement noise at the output of the interferometer fringe detection

Druh

D - Stať ve sborníku

CEP obor

BH - Optika, masery a lasery

OECD FORD obor

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Projekt

Výsledek vznikl pri realizaci vícero projektů. Více informací v záložce Projekty.

Návaznosti

P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)<br>I - Institucionalni podpora na dlouhodoby koncepcni rozvoj vyzkumne organizace

Rok uplatnění

2012

Kód důvěrnosti údajů

S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Název statě ve sborníku

Optical Micro- and Nanometrology IV, (Proceedings of SPIE )

ISBN

978-0-8194-9122-0

ISSN

—

e-ISSN

—

Počet stran výsledku

9

Strana od-do

"84301D:1"-"9"

Název nakladatele

SPIE

Místo vydání

Bellingham

Místo konání akce

Brussels

Datum konání akce

16. 4. 2012

Typ akce podle státní příslušnosti

WRD - Celosvětová akce

Kód UT WoS článku

000305704500043