Calculation of difraction aberration using differential algebra

Kód výsledku v IS VaVaI

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Výsledek na webu

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DOI - Digital Object Identifier

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Jazyk výsledku

angličtina

Název v původním jazyce

Calculation of difraction aberration using differential algebra

Popis výsledku v původním jazyce

The resolution in light microscopy is limited mainly by the wave length of light. Although the wave length of the electron is several orders Of magnitude smaller than that of light, the wave properties of the electron limit the resolution of scanning electron microscopes as well. It is described by the diffraction on the limiting aperture. While the effect of the diffraction can be reduced by increasing the limiting aperture size, it affects the resolution by increased geometrical and chromatic aberrations, that are more critical in the electron optics than in the light optics. These opposite trends cause that the best resolution is given by an aperture size that balances the effect of the diffraction with the effect of geometric and chromatic aberrations - an optimal aperture.

Název v anglickém jazyce

Calculation of difraction aberration using differential algebra

Popis výsledku anglicky

The resolution in light microscopy is limited mainly by the wave length of light. Although the wave length of the electron is several orders Of magnitude smaller than that of light, the wave properties of the electron limit the resolution of scanning electron microscopes as well. It is described by the diffraction on the limiting aperture. While the effect of the diffraction can be reduced by increasing the limiting aperture size, it affects the resolution by increased geometrical and chromatic aberrations, that are more critical in the electron optics than in the light optics. These opposite trends cause that the best resolution is given by an aperture size that balances the effect of the diffraction with the effect of geometric and chromatic aberrations - an optimal aperture.

Druh

D - Stať ve sborníku

CEP obor

JA - Elektronika a optoelektronika, elektrotechnika

OECD FORD obor

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Projekt

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Návaznosti

I - Institucionalni podpora na dlouhodoby koncepcni rozvoj vyzkumne organizace

Rok uplatnění

2012

Kód důvěrnosti údajů

S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Název statě ve sborníku

Proceedings of the 13th International Seminar on Recent Trends in Charged Particle Optics and Surface Physics Instrumentation

ISBN

978-80-87441-07-7

ISSN

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e-ISSN

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Počet stran výsledku

4

Strana od-do

59-62

Název nakladatele

Institute of Scientific Instruments AS CR, v.v.i

Místo vydání

Brno

Místo konání akce

Skalský dvůr

Datum konání akce

25. 6. 2012

Typ akce podle státní příslušnosti

WRD - Celosvětová akce

Kód UT WoS článku

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