Automatic unit for measuring refractive index of air based on Ciddor equation and its verification using direct interferometric measurement method

Kód výsledku v IS VaVaI

<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F68081731%3A_____%2F13%3A00421237" target="_blank" >RIV/68081731:_____/13:00421237 - isvavai.cz</a>

Výsledek na webu

<a href="http://dx.doi.org/10.1117/12.2020756" target="_blank" >http://dx.doi.org/10.1117/12.2020756</a>

DOI - Digital Object Identifier

<a href="http://dx.doi.org/10.1117/12.2020756" target="_blank" >10.1117/12.2020756</a>

Jazyk výsledku

angličtina

Název v původním jazyce

Automatic unit for measuring refractive index of air based on Ciddor equation and its verification using direct interferometric measurement method

Popis výsledku v původním jazyce

In scanning probe microscopy laser interferometers are usually used for measuring the position of the probe tip with a metrological traceability. As the most of the AFM setups are designed to work under standard atmospheric conditions the changes of therefractive index of air have an influence to measured values of the length with 1.0exp(-4) relatively. In order to achieve better accuracies the refractive index of air has to be monitored continuously and its instantaneous value has to be used for compensating the lengths measured by all of the interferometric axes. In the presented work we developed a new concept of an electronic unit which is able to monitor the refractive index of air on basis of measurement of ambient atmospheric conditions: temperature, humidity, pressure of the air and the CO2 concentration. The data processing is based on Ciddor equation for calculating the refractive index of air. The important advantage of the unit is a very low power consumption of the electr

Název v anglickém jazyce

Automatic unit for measuring refractive index of air based on Ciddor equation and its verification using direct interferometric measurement method

Popis výsledku anglicky

In scanning probe microscopy laser interferometers are usually used for measuring the position of the probe tip with a metrological traceability. As the most of the AFM setups are designed to work under standard atmospheric conditions the changes of therefractive index of air have an influence to measured values of the length with 1.0exp(-4) relatively. In order to achieve better accuracies the refractive index of air has to be monitored continuously and its instantaneous value has to be used for compensating the lengths measured by all of the interferometric axes. In the presented work we developed a new concept of an electronic unit which is able to monitor the refractive index of air on basis of measurement of ambient atmospheric conditions: temperature, humidity, pressure of the air and the CO2 concentration. The data processing is based on Ciddor equation for calculating the refractive index of air. The important advantage of the unit is a very low power consumption of the electr

Druh

D - Stať ve sborníku

CEP obor

JA - Elektronika a optoelektronika, elektrotechnika

OECD FORD obor

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Projekt

Výsledek vznikl pri realizaci vícero projektů. Více informací v záložce Projekty.

Návaznosti

I - Institucionalni podpora na dlouhodoby koncepcni rozvoj vyzkumne organizace

Rok uplatnění

2013

Kód důvěrnosti údajů

S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Název statě ve sborníku

Optical Measurement Systems for Industrial Inspection VIII (Proceedings of SPIE Vol. 8788)

ISBN

978-0-8194-9604-1

ISSN

—

e-ISSN

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Počet stran výsledku

9

Strana od-do

"878837:1"-"9"

Název nakladatele

SPIE

Místo vydání

Bellingham

Místo konání akce

Munich

Datum konání akce

13. 5. 2013

Typ akce podle státní příslušnosti

WRD - Celosvětová akce

Kód UT WoS článku

000323493700104