The smart electronic unit for precise measurement of refractive index of air in a nano-positioning stage for scanning probe microscopy (SPM)

Kód výsledku v IS VaVaI

<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F68081731%3A_____%2F12%3A00385786" target="_blank" >RIV/68081731:_____/12:00385786 - isvavai.cz</a>

Výsledek na webu

—

DOI - Digital Object Identifier

—

Jazyk výsledku

angličtina

Název v původním jazyce

The smart electronic unit for precise measurement of refractive index of air in a nano-positioning stage for scanning probe microscopy (SPM)

Popis výsledku v původním jazyce

When the traceable measurement of dimensions of samples in scanning probe microscopy is needed the position of the probe tip has to be monitored by a set of laser interferometers. The measurement is done very often during standard atmospheric conditionsso the changes of the refractive index of air have an influence to measured values of the length with 1.0exp(-4) relatively. Thus the measurement of the refractive index of air and application of the instantaneous value of the index to all of measurementinterferometric axes is necessary. In the work we developed new concept of electronic unit which is able to monitor the refractive index of air on basis of measurement of weather conditions: temperature, humidity and pressure of the air. The unit uses modified Edlen formula for calculation of the refractive index. The next step of the work is verification of accuracy of the measuring capability of the unit. We tested the accuracy with reference unit which measure the refractive index of

Název v anglickém jazyce

The smart electronic unit for precise measurement of refractive index of air in a nano-positioning stage for scanning probe microscopy (SPM)

Popis výsledku anglicky

When the traceable measurement of dimensions of samples in scanning probe microscopy is needed the position of the probe tip has to be monitored by a set of laser interferometers. The measurement is done very often during standard atmospheric conditionsso the changes of the refractive index of air have an influence to measured values of the length with 1.0exp(-4) relatively. Thus the measurement of the refractive index of air and application of the instantaneous value of the index to all of measurementinterferometric axes is necessary. In the work we developed new concept of electronic unit which is able to monitor the refractive index of air on basis of measurement of weather conditions: temperature, humidity and pressure of the air. The unit uses modified Edlen formula for calculation of the refractive index. The next step of the work is verification of accuracy of the measuring capability of the unit. We tested the accuracy with reference unit which measure the refractive index of

Druh

D - Stať ve sborníku

CEP obor

JA - Elektronika a optoelektronika, elektrotechnika

OECD FORD obor

—

Projekt

Výsledek vznikl pri realizaci vícero projektů. Více informací v záložce Projekty.

Návaznosti

I - Institucionalni podpora na dlouhodoby koncepcni rozvoj vyzkumne organizace

Rok uplatnění

2012

Kód důvěrnosti údajů

S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Název statě ve sborníku

NANOCON 2012, 4th International Conference Proceedings

ISBN

978-80-87294-32-1

ISSN

—

e-ISSN

—

Počet stran výsledku

5

Strana od-do

817-821

Název nakladatele

TANGER Ltd

Místo vydání

Ostrava

Místo konání akce

Brno

Datum konání akce

23. 10. 2012

Typ akce podle státní příslušnosti

WRD - Celosvětová akce

Kód UT WoS článku

—