Advanced interferometry systems for dimensional measurement in nanometrology

Kód výsledku v IS VaVaI

<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F68081731%3A_____%2F14%3A00441274" target="_blank" >RIV/68081731:_____/14:00441274 - isvavai.cz</a>

Výsledek na webu

<a href="http://dx.doi.org/10.1117/12.2086613" target="_blank" >http://dx.doi.org/10.1117/12.2086613</a>

DOI - Digital Object Identifier

<a href="http://dx.doi.org/10.1117/12.2086613" target="_blank" >10.1117/12.2086613</a>

Jazyk výsledku

angličtina

Název v původním jazyce

Advanced interferometry systems for dimensional measurement in nanometrology

Popis výsledku v původním jazyce

We report on the results of the common collaborative project of applied research where the Institute of Scfientific Instruments (ISI) of the Academy of Sciences of the Czech Republic and a company Meopta ? optika joined their effort in development of high-precision interferometric systems for dimensional metrology and nanometrology. This research exploits previous results in the field of laser standards of optical frequencies and the methodology of interferometric metrology of length together with detection systems of interference signals and their processing at the ISI and the production technology of precise optical components at Meopta ? optika. The main aim of the project is a design of a complex interferometric measuring system in a form of a prototype serving as a master for further production. It concept is a modular family of components configurable for various arrangements primarily for multi-axis measurements in nanotechnology and surface inspection. Within this project we de

Název v anglickém jazyce

Advanced interferometry systems for dimensional measurement in nanometrology

Popis výsledku anglicky

We report on the results of the common collaborative project of applied research where the Institute of Scfientific Instruments (ISI) of the Academy of Sciences of the Czech Republic and a company Meopta ? optika joined their effort in development of high-precision interferometric systems for dimensional metrology and nanometrology. This research exploits previous results in the field of laser standards of optical frequencies and the methodology of interferometric metrology of length together with detection systems of interference signals and their processing at the ISI and the production technology of precise optical components at Meopta ? optika. The main aim of the project is a design of a complex interferometric measuring system in a form of a prototype serving as a master for further production. It concept is a modular family of components configurable for various arrangements primarily for multi-axis measurements in nanotechnology and surface inspection. Within this project we de

Druh

D - Stať ve sborníku

CEP obor

BH - Optika, masery a lasery

OECD FORD obor

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Projekt

Výsledek vznikl pri realizaci vícero projektů. Více informací v záložce Projekty.

Návaznosti

I - Institucionalni podpora na dlouhodoby koncepcni rozvoj vyzkumne organizace

Rok uplatnění

2014

Kód důvěrnosti údajů

S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Název statě ve sborníku

Optics and Measurement Conference 2014 (Proceedings of SPIE 9442)

ISBN

9781628415575

ISSN

0277-786X

e-ISSN

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Počet stran výsledku

6

Strana od-do

"94420P: 1"-"6"

Název nakladatele

SPIE

Místo vydání

Bellingham

Místo konání akce

Liberec

Datum konání akce

7. 10. 2014

Typ akce podle státní příslušnosti

WRD - Celosvětová akce

Kód UT WoS článku

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