Optimal X-ray detection for thin samples in low-energy STEM

Kód výsledku v IS VaVaI

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Výsledek na webu

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DOI - Digital Object Identifier

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Jazyk výsledku

angličtina

Název v původním jazyce

Optimal X-ray detection for thin samples in low-energy STEM

Popis výsledku v původním jazyce

In many applications it is desirable to perform energy-dispersive X-ray spectroscopy (EDS) on very thin samples at low primary beam energies in a STEM. Thin samples, or lamellae, with the thickness of about 10 nm, are mostly prepared in focused ion beam instruments (FIBs), and they are used to evaluate experiments in the development of thin films and coatings, in the semiconductor industry, and in other applications. EDS then provides a map of different chemical elements or compounds in the sample, obtained by scanning the electron beam in a raster. Often the qualitative composition is known as a limited set of materials and only their distribution on the sample is to be determined. For large batches of samples fast measurements are desired to maximize utilization of expensive equipment. In this study we found a method to minimize the time needed to reliably acquire an elemental map by determining the optimal detector placement and the minimal necessary primary electron dose per pixel.

Název v anglickém jazyce

Optimal X-ray detection for thin samples in low-energy STEM

Popis výsledku anglicky

In many applications it is desirable to perform energy-dispersive X-ray spectroscopy (EDS) on very thin samples at low primary beam energies in a STEM. Thin samples, or lamellae, with the thickness of about 10 nm, are mostly prepared in focused ion beam instruments (FIBs), and they are used to evaluate experiments in the development of thin films and coatings, in the semiconductor industry, and in other applications. EDS then provides a map of different chemical elements or compounds in the sample, obtained by scanning the electron beam in a raster. Often the qualitative composition is known as a limited set of materials and only their distribution on the sample is to be determined. For large batches of samples fast measurements are desired to maximize utilization of expensive equipment. In this study we found a method to minimize the time needed to reliably acquire an elemental map by determining the optimal detector placement and the minimal necessary primary electron dose per pixel.

Druh

D - Stať ve sborníku

CEP obor

JA - Elektronika a optoelektronika, elektrotechnika

OECD FORD obor

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Projekt

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Návaznosti

I - Institucionalni podpora na dlouhodoby koncepcni rozvoj vyzkumne organizace

Rok uplatnění

2016

Kód důvěrnosti údajů

S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Název statě ve sborníku

Proceedings of the 15th International Seminar on Recent Trends in Charged Particle Optics and Surface Physics Instrumentation

ISBN

978-80-87441-17-6

ISSN

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e-ISSN

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Počet stran výsledku

2

Strana od-do

44-45

Název nakladatele

Institute of Scientific Instruments CAS

Místo vydání

Brno

Místo konání akce

Skalský dvůr

Datum konání akce

29. 5. 2016

Typ akce podle státní příslušnosti

WRD - Celosvětová akce

Kód UT WoS článku

000391254000020