Coordinate interferometric measurement with infrared telecom laser diode

Kód výsledku v IS VaVaI

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Výsledek na webu

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DOI - Digital Object Identifier

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Jazyk výsledku

angličtina

Název v původním jazyce

Coordinate interferometric measurement with infrared telecom laser diode

Popis výsledku v původním jazyce

We present the design of an interferometric position measuring system for the control of the sample-carrying translation stage in an e-beam writer with reproducibility of the position on nanometre level and resolution below nanometre. We introducedndifferential configuration of the interferometer where the position is measured with respect to a central reference point to eliminate deformations caused by thermal and pressure effects on the vacuum chamber. The reference is here the electron gun of the writer. The interferometer is designed to operate at infrared telecommunication wavelength due to the risk ofninterference of stray light with sensitive photodetectors in the chamber. The laser source used is a narrow-linewidth DFB laser diode with a custom-developed electronics that allows for high precision and stability of the laser diode chip temperature and the injection current, very low-noise, EMI protection and high-frequency modulation capability. Detection of the interferometricnsignal relies on a technique using a high frequency modulation of the laser's optical frequency and the single-detector phasesensitive detection.

Název v anglickém jazyce

Coordinate interferometric measurement with infrared telecom laser diode

Popis výsledku anglicky

We present the design of an interferometric position measuring system for the control of the sample-carrying translation stage in an e-beam writer with reproducibility of the position on nanometre level and resolution below nanometre. We introducedndifferential configuration of the interferometer where the position is measured with respect to a central reference point to eliminate deformations caused by thermal and pressure effects on the vacuum chamber. The reference is here the electron gun of the writer. The interferometer is designed to operate at infrared telecommunication wavelength due to the risk ofninterference of stray light with sensitive photodetectors in the chamber. The laser source used is a narrow-linewidth DFB laser diode with a custom-developed electronics that allows for high precision and stability of the laser diode chip temperature and the injection current, very low-noise, EMI protection and high-frequency modulation capability. Detection of the interferometricnsignal relies on a technique using a high frequency modulation of the laser's optical frequency and the single-detector phasesensitive detection.

Druh

D - Stať ve sborníku

CEP obor

BH - Optika, masery a lasery

OECD FORD obor

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Projekt

Výsledek vznikl pri realizaci vícero projektů. Více informací v záložce Projekty.

Návaznosti

I - Institucionalni podpora na dlouhodoby koncepcni rozvoj vyzkumne organizace

Rok uplatnění

2016

Kód důvěrnosti údajů

S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Název statě ve sborníku

EUSPEN 2016. Proceedings of the 16th International Conference of the European Society for Precision Engineering and Nanotechnology

ISBN

978-095667908-6

ISSN

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e-ISSN

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Počet stran výsledku

3

Strana od-do

"P1.58.1"-"P1.58.3"

Název nakladatele

Euspen

Místo vydání

Nottingham

Místo konání akce

Nottingham

Datum konání akce

30. 5. 2016

Typ akce podle státní příslušnosti

WRD - Celosvětová akce

Kód UT WoS článku

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