Coordinate interferometric system for measuring the position of a sample with infrared telecom laser diode

Kód výsledku v IS VaVaI

<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F68081731%3A_____%2F16%3A00468858" target="_blank" >RIV/68081731:_____/16:00468858 - isvavai.cz</a>

Výsledek na webu

<a href="http://dx.doi.org/10.1117/12.2257319" target="_blank" >http://dx.doi.org/10.1117/12.2257319</a>

DOI - Digital Object Identifier

<a href="http://dx.doi.org/10.1117/12.2257319" target="_blank" >10.1117/12.2257319</a>

Jazyk výsledku

angličtina

Název v původním jazyce

Coordinate interferometric system for measuring the position of a sample with infrared telecom laser diode

Popis výsledku v původním jazyce

We report on a design of an interferometric position measuring system for control of a sample stage in an e-beam writer with reproducibility of the position on nanometer level and resolution below nanometer. We introduced differential configuration of the interferometer where the position is measured with respect to a central reference point to eliminate deformations caused by thermal and pressure effects on the vacuum chamber. The reference is here the electron gun of the writer. The interferometer is designed to operate at infrared, telecommunication wavelength due to the risk of interference of stray light with sensitive photodetectors in the chamber. The laser source is here a narrow-linewidth DFB laser diode with electronics of our own design offering precision and stability of temperature and current, low-noise, protection from rf interference, and high-frequency modulation. Detection of the interferometric signal relies on a novel derivative technique utilizing hf frequency modulation and phase-sensitive detection.

Název v anglickém jazyce

Coordinate interferometric system for measuring the position of a sample with infrared telecom laser diode

Popis výsledku anglicky

We report on a design of an interferometric position measuring system for control of a sample stage in an e-beam writer with reproducibility of the position on nanometer level and resolution below nanometer. We introduced differential configuration of the interferometer where the position is measured with respect to a central reference point to eliminate deformations caused by thermal and pressure effects on the vacuum chamber. The reference is here the electron gun of the writer. The interferometer is designed to operate at infrared, telecommunication wavelength due to the risk of interference of stray light with sensitive photodetectors in the chamber. The laser source is here a narrow-linewidth DFB laser diode with electronics of our own design offering precision and stability of temperature and current, low-noise, protection from rf interference, and high-frequency modulation. Detection of the interferometric signal relies on a novel derivative technique utilizing hf frequency modulation and phase-sensitive detection.

Druh

D - Stať ve sborníku

CEP obor

—

OECD FORD obor

10306 - Optics (including laser optics and quantum optics)

Projekt

Výsledek vznikl pri realizaci vícero projektů. Více informací v záložce Projekty.

Návaznosti

I - Institucionalni podpora na dlouhodoby koncepcni rozvoj vyzkumne organizace

Rok uplatnění

2016

Kód důvěrnosti údajů

S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Název statě ve sborníku

Optics and Measurement International Conference 2016 (Proceedings of SPIE 10151)

ISBN

—

ISSN

0277-786X

e-ISSN

—

Počet stran výsledku

4

Strana od-do

1-4

Název nakladatele

SPIE

Místo vydání

Bellingham

Místo konání akce

Liberec

Datum konání akce

11. 9. 2016

Typ akce podle státní příslušnosti

WRD - Celosvětová akce

Kód UT WoS článku

000393154700033