Fluctuations of focused electron beam in a conventional SEM

Kód výsledku v IS VaVaI

<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F68081731%3A_____%2F19%3A00508156" target="_blank" >RIV/68081731:_____/19:00508156 - isvavai.cz</a>

Nalezeny alternativní kódy

RIV/00216305:26220/19:PU133716

Výsledek na webu

<a href="https://www.sciencedirect.com/science/article/pii/S0304399119300683?via%3Dihub" target="_blank" >https://www.sciencedirect.com/science/article/pii/S0304399119300683?via%3Dihub</a>

DOI - Digital Object Identifier

<a href="http://dx.doi.org/10.1016/j.ultramic.2019.05.008" target="_blank" >10.1016/j.ultramic.2019.05.008</a>

Jazyk výsledku

angličtina

Název v původním jazyce

Fluctuations of focused electron beam in a conventional SEM

Popis výsledku v původním jazyce

Noise diagnostics was performed on a tungsten hairpin cathode that was used in conventional scanning electron microscope (SEM) which operates in a high vacuum. The focused beam was firstly measured and its power spectrum obtained in order to characterize its slope in the lower frequencies which are connected with the events occurring on the cathode surface during the emission of electrons. Further experiments involved additional noise measurements which evaluated electron beam with altering beam energy, in particular at 5 kV, 10 kV and 20 kV up to 30 kV, with and without electron beam scanning involved and with different levels of cathode heating. Obtained results were evaluated in relation to a 1/f type noise component, generation-recombination process on the cathode surface, on the shot noise and on the velocity fluctuations caused by the ion oscillations. Achieved results were discussed.

Název v anglickém jazyce

Fluctuations of focused electron beam in a conventional SEM

Popis výsledku anglicky

Noise diagnostics was performed on a tungsten hairpin cathode that was used in conventional scanning electron microscope (SEM) which operates in a high vacuum. The focused beam was firstly measured and its power spectrum obtained in order to characterize its slope in the lower frequencies which are connected with the events occurring on the cathode surface during the emission of electrons. Further experiments involved additional noise measurements which evaluated electron beam with altering beam energy, in particular at 5 kV, 10 kV and 20 kV up to 30 kV, with and without electron beam scanning involved and with different levels of cathode heating. Obtained results were evaluated in relation to a 1/f type noise component, generation-recombination process on the cathode surface, on the shot noise and on the velocity fluctuations caused by the ion oscillations. Achieved results were discussed.

Druh

J_imp - Článek v periodiku v databázi Web of Science

CEP obor

—

OECD FORD obor

10303 - Particles and field physics

Projekt

Výsledek vznikl pri realizaci vícero projektů. Více informací v záložce Projekty.

Návaznosti

I - Institucionalni podpora na dlouhodoby koncepcni rozvoj vyzkumne organizace

Rok uplatnění

2019

Kód důvěrnosti údajů

S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Název periodika

Ultramicroscopy

ISSN

0304-3991

e-ISSN

—

Svazek periodika

204

Číslo periodika v rámci svazku

SEP

Stát vydavatele periodika

NL - Nizozemsko

Počet stran výsledku

6

Strana od-do

49-54

Kód UT WoS článku

000472485000007

EID výsledku v databázi Scopus

2-s2.0-85065918282