Design of Cryogenic Sample Holder with Electrical Contacts for UHV SEM/SPM

Kód výsledku v IS VaVaI

<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F68081731%3A_____%2F19%3A00509126" target="_blank" >RIV/68081731:_____/19:00509126 - isvavai.cz</a>

Výsledek na webu

<a href="http://dx.doi.org/10.18462/iir.cryo.2019.0031" target="_blank" >http://dx.doi.org/10.18462/iir.cryo.2019.0031</a>

DOI - Digital Object Identifier

<a href="http://dx.doi.org/10.18462/iir.cryo.2019.0031" target="_blank" >10.18462/iir.cryo.2019.0031</a>

Jazyk výsledku

angličtina

Název v původním jazyce

Design of Cryogenic Sample Holder with Electrical Contacts for UHV SEM/SPM

Popis výsledku v původním jazyce

We present design of a cryogenic sample holder for an ultra-high vacuum scanning electron microscope combined with scanning probe microscope (UHV SEM/SPM). The microscope is suitable for fabrication and characterization of nanostructures in the low temperature range of 20 K - 300 K. This newly designed sample holder is equipped with ten spring-loaded electrical contacts for electrical connection of a removable transport pallet to the sample holder. The transport pallet with a sample is equipped with a low temperature sensor, a heating element and ten solid pins. Two quadruples of contacts are reserved for the sample and the temperature sensor allowing thus a precise four-wire measurement of electrical properties of the sample and its temperature. The remaining pair is reserved for two-wire connection of the heating element. In the low-temperature tests, the limit temperature of 22 K was reached in a test vacuum chamber with a cryogenic helium flow cooling system. The ambient temperature was 300 K. The contact function was successfully verified by measuring the transient electrical resistance within the whole range of the working temperatures. Additionally, a thorough research study of commercially available sample holders indicates that the holders for the intended use are not available on the market.

Název v anglickém jazyce

Design of Cryogenic Sample Holder with Electrical Contacts for UHV SEM/SPM

Popis výsledku anglicky

We present design of a cryogenic sample holder for an ultra-high vacuum scanning electron microscope combined with scanning probe microscope (UHV SEM/SPM). The microscope is suitable for fabrication and characterization of nanostructures in the low temperature range of 20 K - 300 K. This newly designed sample holder is equipped with ten spring-loaded electrical contacts for electrical connection of a removable transport pallet to the sample holder. The transport pallet with a sample is equipped with a low temperature sensor, a heating element and ten solid pins. Two quadruples of contacts are reserved for the sample and the temperature sensor allowing thus a precise four-wire measurement of electrical properties of the sample and its temperature. The remaining pair is reserved for two-wire connection of the heating element. In the low-temperature tests, the limit temperature of 22 K was reached in a test vacuum chamber with a cryogenic helium flow cooling system. The ambient temperature was 300 K. The contact function was successfully verified by measuring the transient electrical resistance within the whole range of the working temperatures. Additionally, a thorough research study of commercially available sample holders indicates that the holders for the intended use are not available on the market.

Druh

D - Stať ve sborníku

CEP obor

—

OECD FORD obor

20301 - Mechanical engineering

Projekt

<a href="/cs/project/TE01020233" target="_blank" >TE01020233: Platforma pokročilých mikroskopických a spektroskopických technik pro nano a mikrotechnologie</a><br>

Návaznosti

I - Institucionalni podpora na dlouhodoby koncepcni rozvoj vyzkumne organizace

Rok uplatnění

2019

Kód důvěrnosti údajů

S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Název statě ve sborníku

15th Cryogenics 2019 IIR International Conference. Proceedings

ISBN

978-2-36215-025-8

ISSN

0151-1637

e-ISSN

—

Počet stran výsledku

9

Strana od-do

369-377

Název nakladatele

IIR

Místo vydání

Paris

Místo konání akce

Prague

Datum konání akce

8. 4. 2019

Typ akce podle státní příslušnosti

WRD - Celosvětová akce

Kód UT WoS článku

000472960900050