Determination of thickness refinement using STEM detector segments

Kód výsledku v IS VaVaI

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Výsledek na webu

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DOI - Digital Object Identifier

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Jazyk výsledku

angličtina

Název v původním jazyce

Determination of thickness refinement using STEM detector segments

Popis výsledku v původním jazyce

Quantitative STEM imaging together with Monte Carlo simulations of electron scattering in solids can bring interesting results about properties of many thin samples. It is possible to determine thickness of a sample, to calculate mass of particles and measure mass per length/area. Appropriate calibration is one of the crucial parts of the method. Even a small error or inaccuracy in detector response to electron beam either blanked or full brings significant error into thickness determination. This problem can be overcome by parallel STEM imaging in more segments of the detector. Comparing more segments gives a possibility to use a signal from different segments for different thicknesses of a sample. Accuracy of individual parts of the detector depends on the captured signal quantity. It is desirable to use such a STEM detector segment that provides the greatest signal change to a unit of thickness. To demonstrate the usage, we used a sample of Latex nanospheres placed on thin carbon lacey film, diameter of the nanospheres was around 600 nm in order to compare the results from different detector segments. Thanks to the known thickness of the sample (calculated from its geometrical shape), it is possible to estimate the optimal acquisition settings and post processing steps with the known and the true state of the sample.

Název v anglickém jazyce

Determination of thickness refinement using STEM detector segments

Popis výsledku anglicky

Quantitative STEM imaging together with Monte Carlo simulations of electron scattering in solids can bring interesting results about properties of many thin samples. It is possible to determine thickness of a sample, to calculate mass of particles and measure mass per length/area. Appropriate calibration is one of the crucial parts of the method. Even a small error or inaccuracy in detector response to electron beam either blanked or full brings significant error into thickness determination. This problem can be overcome by parallel STEM imaging in more segments of the detector. Comparing more segments gives a possibility to use a signal from different segments for different thicknesses of a sample. Accuracy of individual parts of the detector depends on the captured signal quantity. It is desirable to use such a STEM detector segment that provides the greatest signal change to a unit of thickness. To demonstrate the usage, we used a sample of Latex nanospheres placed on thin carbon lacey film, diameter of the nanospheres was around 600 nm in order to compare the results from different detector segments. Thanks to the known thickness of the sample (calculated from its geometrical shape), it is possible to estimate the optimal acquisition settings and post processing steps with the known and the true state of the sample.

Druh

D - Stať ve sborníku

CEP obor

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OECD FORD obor

20201 - Electrical and electronic engineering

Projekt

Výsledek vznikl pri realizaci vícero projektů. Více informací v záložce Projekty.

Návaznosti

I - Institucionalni podpora na dlouhodoby koncepcni rozvoj vyzkumne organizace

Rok uplatnění

2019

Kód důvěrnosti údajů

S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Název statě ve sborníku

10th Anniversary International Conference on Nanomaterials - Research and Application (NANOCON 2018)

ISBN

978-80-87294-89-5

ISSN

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e-ISSN

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Počet stran výsledku

5

Strana od-do

677-681

Název nakladatele

Tanger

Místo vydání

Ostrava

Místo konání akce

Brno

Datum konání akce

17. 10. 2018

Typ akce podle státní příslušnosti

EUR - Evropská akce

Kód UT WoS článku

000513131900116