Tunneling induced decomposition of Mo(CO)6 onto TiO2(110) surface

Kód výsledku v IS VaVaI

<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F68378271%3A_____%2F12%3A00437201" target="_blank" >RIV/68378271:_____/12:00437201 - isvavai.cz</a>

Výsledek na webu

<a href="http://dx.doi.org/10.1016/j.vacuum.2011.08.009" target="_blank" >http://dx.doi.org/10.1016/j.vacuum.2011.08.009</a>

DOI - Digital Object Identifier

<a href="http://dx.doi.org/10.1016/j.vacuum.2011.08.009" target="_blank" >10.1016/j.vacuum.2011.08.009</a>

Jazyk výsledku

angličtina

Název v původním jazyce

Tunneling induced decomposition of Mo(CO)6 onto TiO2(110) surface

Popis výsledku v původním jazyce

Tunneling induced decomposition of Mo(CO)(6) from the gas phase was studied on TiO2(110) surface by scanning tunneling microscopy (STM) and spectroscopy (STS). The efficiency of the procedure was followed by measuring the dot volume as a proportional indicator of the amount of the decomposed precursor. It was found that below 1 x 10(-5) Pa background pressure of Mo(CO)(6), there is no measurable effect and above 1 x 10(-4) Pa, the nanodot size is too large compared to the curvature of the tip (20-40 nm). A threshold bias of +3.1(+/- 0.1) V on the sample was measured for the decomposition of Mo(CO)(6) in gas ambient. In the absence of the precursor, dot formation was observed only above +3.7(+/- 0.2) V, in good agreement with the results reported in ourearlier work about nanolithography on clean TiO2(110) substrate (E. Krivan, A. Berko: J. Vac. Sci. & Tech. B 15(1) (1997)25). By applying voltages in the range of 3.1-3.5 V, a systematic enlargement of the created nanodots was found in t

Název v anglickém jazyce

Tunneling induced decomposition of Mo(CO)6 onto TiO2(110) surface

Popis výsledku anglicky

Tunneling induced decomposition of Mo(CO)(6) from the gas phase was studied on TiO2(110) surface by scanning tunneling microscopy (STM) and spectroscopy (STS). The efficiency of the procedure was followed by measuring the dot volume as a proportional indicator of the amount of the decomposed precursor. It was found that below 1 x 10(-5) Pa background pressure of Mo(CO)(6), there is no measurable effect and above 1 x 10(-4) Pa, the nanodot size is too large compared to the curvature of the tip (20-40 nm). A threshold bias of +3.1(+/- 0.1) V on the sample was measured for the decomposition of Mo(CO)(6) in gas ambient. In the absence of the precursor, dot formation was observed only above +3.7(+/- 0.2) V, in good agreement with the results reported in ourearlier work about nanolithography on clean TiO2(110) substrate (E. Krivan, A. Berko: J. Vac. Sci. & Tech. B 15(1) (1997)25). By applying voltages in the range of 3.1-3.5 V, a systematic enlargement of the created nanodots was found in t

Druh

J_x - Nezařazeno - Článek v odborném periodiku (Jimp, Jsc a Jost)

CEP obor

BM - Fyzika pevných látek a magnetismus

OECD FORD obor

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Projekt

—

Návaznosti

I - Institucionalni podpora na dlouhodoby koncepcni rozvoj vyzkumne organizace

Rok uplatnění

2012

Kód důvěrnosti údajů

S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Název periodika

Vacuum

ISSN

0042-207X

e-ISSN

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Svazek periodika

86

Číslo periodika v rámci svazku

6

Stát vydavatele periodika

GB - Spojené království Velké Británie a Severního Irska

Počet stran výsledku

4

Strana od-do

623-626

Kód UT WoS článku

000301018400010

EID výsledku v databázi Scopus

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