Nucleation of ultrathin silver layer by magnetron sputtering in Ar/N2 plasma

Kód výsledku v IS VaVaI

<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F68378271%3A_____%2F13%3A00398554" target="_blank" >RIV/68378271:_____/13:00398554 - isvavai.cz</a>

Výsledek na webu

<a href="http://dx.doi.org/10.1016/j.surfcoat.2012.08.021" target="_blank" >http://dx.doi.org/10.1016/j.surfcoat.2012.08.021</a>

DOI - Digital Object Identifier

<a href="http://dx.doi.org/10.1016/j.surfcoat.2012.08.021" target="_blank" >10.1016/j.surfcoat.2012.08.021</a>

Jazyk výsledku

angličtina

Název v původním jazyce

Nucleation of ultrathin silver layer by magnetron sputtering in Ar/N2 plasma

Popis výsledku v původním jazyce

We focus our attention on the study of the initial stage of the silver growth. The silver layers were deposited by RF magnetron sputtering in pure argon or its mixture with nitrogen. The initial stage of the nucleation and the layer growth was studied bymeans of the optical and electrical monitoring,which are based on a principle of in-situ spectral ellipsometry. The measured data were fitted to a mathematical model. The nano-granular character of the grown layer is revealed by resonant features in theextinction coefficient spectra in visible spectral range. Thus, the mode of the layer growth (Volmer?Weber or Stranski?Krastanov) was clearly distinguished in the monitored data. The microstructure of the completed layer was further analyzed by X-ray diffraction (XRD) and atomic forcemicroscopy (AFM). In thiswork, we showthat the growthmode of the silver can be controlled by the deposition condition.

Název v anglickém jazyce

Nucleation of ultrathin silver layer by magnetron sputtering in Ar/N2 plasma

Popis výsledku anglicky

We focus our attention on the study of the initial stage of the silver growth. The silver layers were deposited by RF magnetron sputtering in pure argon or its mixture with nitrogen. The initial stage of the nucleation and the layer growth was studied bymeans of the optical and electrical monitoring,which are based on a principle of in-situ spectral ellipsometry. The measured data were fitted to a mathematical model. The nano-granular character of the grown layer is revealed by resonant features in theextinction coefficient spectra in visible spectral range. Thus, the mode of the layer growth (Volmer?Weber or Stranski?Krastanov) was clearly distinguished in the monitored data. The microstructure of the completed layer was further analyzed by X-ray diffraction (XRD) and atomic forcemicroscopy (AFM). In thiswork, we showthat the growthmode of the silver can be controlled by the deposition condition.

Druh

J_x - Nezařazeno - Článek v odborném periodiku (Jimp, Jsc a Jost)

CEP obor

BM - Fyzika pevných látek a magnetismus

OECD FORD obor

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Projekt

Výsledek vznikl pri realizaci vícero projektů. Více informací v záložce Projekty.

Návaznosti

I - Institucionalni podpora na dlouhodoby koncepcni rozvoj vyzkumne organizace

Rok uplatnění

2013

Kód důvěrnosti údajů

S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Název periodika

Surface and Coatings Technology

ISSN

0257-8972

e-ISSN

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Svazek periodika

228

Číslo periodika v rámci svazku

1

Stát vydavatele periodika

CH - Švýcarská konfederace

Počet stran výsledku

5

Strana od-do

"S86"-"S90"

Kód UT WoS článku

000323628400020

EID výsledku v databázi Scopus

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