Fabrication of diamond based quartz crystal microbalance gas sensor

Kód výsledku v IS VaVaI

<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F68378271%3A_____%2F14%3A00432192" target="_blank" >RIV/68378271:_____/14:00432192 - isvavai.cz</a>

Nalezeny alternativní kódy

RIV/68407700:21230/14:00209766

Výsledek na webu

<a href="http://dx.doi.org/10.4028/www.scientific.net/KEM.605.589" target="_blank" >http://dx.doi.org/10.4028/www.scientific.net/KEM.605.589</a>

DOI - Digital Object Identifier

<a href="http://dx.doi.org/10.4028/www.scientific.net/KEM.605.589" target="_blank" >10.4028/www.scientific.net/KEM.605.589</a>

Jazyk výsledku

angličtina

Název v původním jazyce

Fabrication of diamond based quartz crystal microbalance gas sensor

Popis výsledku v původním jazyce

Synthetic diamond has remarkable properties comparable with natural diamond and hence is a very promising material for many various applications. Nowadays, deposition of diamond films is normally employed in chemical vapor deposition (CVD) usually at high temperatures, what limit its application to high melting substrates. Gravimetric (mass) sensors belong to the major categories of chemical sensors and the most common type of mass sensor is the bulk acoustic quartz crystal microbalance (QCM). This contribution deals with a NCD growth from the H2/CH4/CO2 gas mixture at low temperature (400 °C) by pulsed linear antenna MWCVD plasma system on 10 MHz circular AT-cut quartz resonators substrate. Gas sensor based on the NCD-coated QCM was developed for detection of ammonia at room temperature. Measurements not only confirmed the functionality of this first published NCD-coated QCM sensor, but in addition its sensitivity was twofold to a virgin QCM sensor with a gold active layer.

Název v anglickém jazyce

Fabrication of diamond based quartz crystal microbalance gas sensor

Popis výsledku anglicky

Synthetic diamond has remarkable properties comparable with natural diamond and hence is a very promising material for many various applications. Nowadays, deposition of diamond films is normally employed in chemical vapor deposition (CVD) usually at high temperatures, what limit its application to high melting substrates. Gravimetric (mass) sensors belong to the major categories of chemical sensors and the most common type of mass sensor is the bulk acoustic quartz crystal microbalance (QCM). This contribution deals with a NCD growth from the H2/CH4/CO2 gas mixture at low temperature (400 °C) by pulsed linear antenna MWCVD plasma system on 10 MHz circular AT-cut quartz resonators substrate. Gas sensor based on the NCD-coated QCM was developed for detection of ammonia at room temperature. Measurements not only confirmed the functionality of this first published NCD-coated QCM sensor, but in addition its sensitivity was twofold to a virgin QCM sensor with a gold active layer.

Druh

D - Stať ve sborníku

CEP obor

JB - Senzory, čidla, měření a regulace

OECD FORD obor

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Projekt

<a href="/cs/project/GAP108%2F11%2F0794" target="_blank" >GAP108/11/0794: Vizualizace tvorby kolagenu osteogenními buňkami v kulturách na vrstvách nanokrystalického diamantu</a><br>

Návaznosti

I - Institucionalni podpora na dlouhodoby koncepcni rozvoj vyzkumne organizace

Rok uplatnění

2014

Kód důvěrnosti údajů

S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Název statě ve sborníku

Key Engineering Materials : Materials and Applications for Sensors and Transducers III

ISBN

9783038350514

ISSN

1013-9826

e-ISSN

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Počet stran výsledku

4

Strana od-do

589-592

Název nakladatele

Trans Tech Publications

Místo vydání

Zurich

Místo konání akce

Praha

Datum konání akce

13. 9. 2013

Typ akce podle státní příslušnosti

WRD - Celosvětová akce

Kód UT WoS článku

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