Quartz crystal microbalance gas sensor with nanocrystalline diamond sensitive layer

Kód výsledku v IS VaVaI

<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F68407700%3A21230%2F15%3A00233836" target="_blank" >RIV/68407700:21230/15:00233836 - isvavai.cz</a>

Nalezeny alternativní kódy

RIV/68378271:_____/15:00454769

Výsledek na webu

<a href="http://onlinelibrary.wiley.com/doi/10.1002/pssb.201552229/abstract" target="_blank" >http://onlinelibrary.wiley.com/doi/10.1002/pssb.201552229/abstract</a>

DOI - Digital Object Identifier

<a href="http://dx.doi.org/10.1002/pssb.201552229" target="_blank" >10.1002/pssb.201552229</a>

Jazyk výsledku

angličtina

Název v původním jazyce

Quartz crystal microbalance gas sensor with nanocrystalline diamond sensitive layer

Popis výsledku v původním jazyce

Gas sensors based on a quartz crystal microbalance (QCM) coated with nanocrystalline diamond (NCD) were developed and tested on NH3, CO2, and humidity detection at room temperature and compared with the bare (uncoated) QCM. NCD films were directly grownon the QCM by a large-area pulsed linear-antenna microwave plasma CVD process from the CH4/CO2/H2 gas mixture at temperatures below 400?°C. The as-grown NCD films on QCM and reference Si substrates were characterized by scanning electron and atomic forcemicroscopies as well as Raman and optical spectroscopies. The NCD-coated QCM gas sensors showed a reasonable performance with a stable repeatability to the tested gases. The response time of the tested diamond-coated sensor was fast (~5s). Moreover, wealso observed higher sensitivity and better stability for NCD-coated QCM than for the bare QCM.

Název v anglickém jazyce

Quartz crystal microbalance gas sensor with nanocrystalline diamond sensitive layer

Popis výsledku anglicky

Gas sensors based on a quartz crystal microbalance (QCM) coated with nanocrystalline diamond (NCD) were developed and tested on NH3, CO2, and humidity detection at room temperature and compared with the bare (uncoated) QCM. NCD films were directly grownon the QCM by a large-area pulsed linear-antenna microwave plasma CVD process from the CH4/CO2/H2 gas mixture at temperatures below 400?°C. The as-grown NCD films on QCM and reference Si substrates were characterized by scanning electron and atomic forcemicroscopies as well as Raman and optical spectroscopies. The NCD-coated QCM gas sensors showed a reasonable performance with a stable repeatability to the tested gases. The response time of the tested diamond-coated sensor was fast (~5s). Moreover, wealso observed higher sensitivity and better stability for NCD-coated QCM than for the bare QCM.

Druh

J_x - Nezařazeno - Článek v odborném periodiku (Jimp, Jsc a Jost)

CEP obor

JA - Elektronika a optoelektronika, elektrotechnika

OECD FORD obor

—

Projekt

<a href="/cs/project/GBP108%2F12%2FG108" target="_blank" >GBP108/12/G108: Příprava, modifikace a charakterizace materiálů zářením</a><br>

Návaznosti

S - Specificky vyzkum na vysokych skolach

Rok uplatnění

2015

Kód důvěrnosti údajů

S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Název periodika

physica status solidi (b)

ISSN

0370-1972

e-ISSN

—

Svazek periodika

252

Číslo periodika v rámci svazku

11

Stát vydavatele periodika

DE - Spolková republika Německo

Počet stran výsledku

7

Strana od-do

2591-2597

Kód UT WoS článku

000364690400040

EID výsledku v databázi Scopus

2-s2.0-84946496562