A comparison of the structural changes and optical properties of LiNbO3, Al2O3 and ZnO after Er+ ion implantation

Kód výsledku v IS VaVaI

<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F68378271%3A_____%2F14%3A00433165" target="_blank" >RIV/68378271:_____/14:00433165 - isvavai.cz</a>

Nalezeny alternativní kódy

RIV/61389005:_____/14:00433165 RIV/60461373:22310/14:43897964 RIV/44555601:13440/14:43885851

Výsledek na webu

<a href="http://dx.doi.org/10.1016/j.nimb.2013.11.047" target="_blank" >http://dx.doi.org/10.1016/j.nimb.2013.11.047</a>

DOI - Digital Object Identifier

<a href="http://dx.doi.org/10.1016/j.nimb.2013.11.047" target="_blank" >10.1016/j.nimb.2013.11.047</a>

Jazyk výsledku

angličtina

Název v původním jazyce

A comparison of the structural changes and optical properties of LiNbO3, Al2O3 and ZnO after Er+ ion implantation

Popis výsledku v původním jazyce

This paper reports on the structural as well as compositional changes of LiNbO3, Al2O3 and ZnO crystals, implanted with Er+ ions at 190 keV a with fluence of 1.0 x 10(16) cm(-2) into the < 0001 > crystallographic cuts. Post-implantation annealing at 1000degrees C in oxygen atmosphere was also done. The chemical compositions and erbium concentration-depth profiles of implanted layers were studied by Rutherford Backscattering Spectrometry (RBS) and compared to SRIM simulations. The same value of the maximum erbium concentration (up to 2 at.%) was observed at a depth of about 40 nm for all crystals. The structural properties of the prepared layers were characterised by RBS/channelling. The relative numbers of disordered atoms in the prepared implanted layers were compared with each other and discussed for various crystals. It has been found that erbium is located in LiNbO3 and in Al2O3 preferably in interstitial positions, unlike ZnO, where the largest amount of erbium (about 83%) is pla

Název v anglickém jazyce

A comparison of the structural changes and optical properties of LiNbO3, Al2O3 and ZnO after Er+ ion implantation

Popis výsledku anglicky

This paper reports on the structural as well as compositional changes of LiNbO3, Al2O3 and ZnO crystals, implanted with Er+ ions at 190 keV a with fluence of 1.0 x 10(16) cm(-2) into the < 0001 > crystallographic cuts. Post-implantation annealing at 1000degrees C in oxygen atmosphere was also done. The chemical compositions and erbium concentration-depth profiles of implanted layers were studied by Rutherford Backscattering Spectrometry (RBS) and compared to SRIM simulations. The same value of the maximum erbium concentration (up to 2 at.%) was observed at a depth of about 40 nm for all crystals. The structural properties of the prepared layers were characterised by RBS/channelling. The relative numbers of disordered atoms in the prepared implanted layers were compared with each other and discussed for various crystals. It has been found that erbium is located in LiNbO3 and in Al2O3 preferably in interstitial positions, unlike ZnO, where the largest amount of erbium (about 83%) is pla

Druh

J_x - Nezařazeno - Článek v odborném periodiku (Jimp, Jsc a Jost)

CEP obor

BG - Jaderná, atomová a molekulová fyzika, urychlovače

OECD FORD obor

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Projekt

Výsledek vznikl pri realizaci vícero projektů. Více informací v záložce Projekty.

Návaznosti

I - Institucionalni podpora na dlouhodoby koncepcni rozvoj vyzkumne organizace

Rok uplatnění

2014

Kód důvěrnosti údajů

S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Název periodika

Nuclear Instruments & Methods in Physics Research Section B

ISSN

0168-583X

e-ISSN

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Svazek periodika

331

Číslo periodika v rámci svazku

JUL

Stát vydavatele periodika

NL - Nizozemsko

Počet stran výsledku

5

Strana od-do

182-186

Kód UT WoS článku

000339144600038

EID výsledku v databázi Scopus

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