Erbium-ion implantation into various crystallographic cuts of Al2O3

Kód výsledku v IS VaVaI

<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F68378271%3A_____%2F15%3A00454554" target="_blank" >RIV/68378271:_____/15:00454554 - isvavai.cz</a>

Nalezeny alternativní kódy

RIV/61389005:_____/15:00454554 RIV/60461373:22310/15:43900420 RIV/44555601:13440/15:43886873

Výsledek na webu

<a href="http://dx.doi.org/10.1016/j.nimb.2015.07.024" target="_blank" >http://dx.doi.org/10.1016/j.nimb.2015.07.024</a>

DOI - Digital Object Identifier

<a href="http://dx.doi.org/10.1016/j.nimb.2015.07.024" target="_blank" >10.1016/j.nimb.2015.07.024</a>

Jazyk výsledku

angličtina

Název v původním jazyce

Erbium-ion implantation into various crystallographic cuts of Al2O3

Popis výsledku v původním jazyce

This paper reports on the importance of crystallographic cuts with a different orientation on the luminescent properties and structural changes of Al2O3 implanted with Er+ ions at 190 keV and with a fluence of to x 10(16) cm(-2). Post-implantation annealing at 1000 degrees C in oxygen atmosphere was also done. The chemical compositions and erbium concentration-depth profiles of implanted layers were studied by Rutherford Backscattering Spectrometry (RBS) and compared to SRIM simulations. The same value of the maximum erbium concentration (up to 2 at.%) was observed at a depth of about 40 nm for all crystallographic cuts. The structural properties of the prepared layers were characterised by RBS/channelling. The relative amount of disordered atoms of 70-80% was observed in the prepared implanted layers and discussed for various cuts. It has been found that erbium is positioned randomly in the Al2O3 crystalline matrix, and no preferential positions appeared even after the annealing procedure. Erbium luminescence properties were measured in the wavelength range of 1440-1650 nm for all samples. As-implanted Al2O3 samples had a significant luminescence band at 1530 nm. The best luminescence was repeatedly observed in the < 0 0 0 1 > cut of Al2O3. The annealing procedure significantly improved the luminescent properties.

Název v anglickém jazyce

Erbium-ion implantation into various crystallographic cuts of Al2O3

Popis výsledku anglicky

This paper reports on the importance of crystallographic cuts with a different orientation on the luminescent properties and structural changes of Al2O3 implanted with Er+ ions at 190 keV and with a fluence of to x 10(16) cm(-2). Post-implantation annealing at 1000 degrees C in oxygen atmosphere was also done. The chemical compositions and erbium concentration-depth profiles of implanted layers were studied by Rutherford Backscattering Spectrometry (RBS) and compared to SRIM simulations. The same value of the maximum erbium concentration (up to 2 at.%) was observed at a depth of about 40 nm for all crystallographic cuts. The structural properties of the prepared layers were characterised by RBS/channelling. The relative amount of disordered atoms of 70-80% was observed in the prepared implanted layers and discussed for various cuts. It has been found that erbium is positioned randomly in the Al2O3 crystalline matrix, and no preferential positions appeared even after the annealing procedure. Erbium luminescence properties were measured in the wavelength range of 1440-1650 nm for all samples. As-implanted Al2O3 samples had a significant luminescence band at 1530 nm. The best luminescence was repeatedly observed in the < 0 0 0 1 > cut of Al2O3. The annealing procedure significantly improved the luminescent properties.

Druh

J_x - Nezařazeno - Článek v odborném periodiku (Jimp, Jsc a Jost)

CEP obor

BM - Fyzika pevných látek a magnetismus

OECD FORD obor

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Projekt

Výsledek vznikl pri realizaci vícero projektů. Více informací v záložce Projekty.

Návaznosti

I - Institucionalni podpora na dlouhodoby koncepcni rozvoj vyzkumne organizace

Rok uplatnění

2015

Kód důvěrnosti údajů

S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Název periodika

Nuclear Instruments & Methods in Physics Research Section B

ISSN

0168-583X

e-ISSN

—

Svazek periodika

365

Číslo periodika v rámci svazku

DEC

Stát vydavatele periodika

NL - Nizozemsko

Počet stran výsledku

5

Strana od-do

89-93

Kód UT WoS článku

000366786900021

EID výsledku v databázi Scopus

2-s2.0-84948564581