Interaction of Extreme Ultraviolet Laser Radiation with Solid Surface: Ablation, Desorption, Nanostructuring

Kód výsledku v IS VaVaI

<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F68378271%3A_____%2F14%3A00436689" target="_blank" >RIV/68378271:_____/14:00436689 - isvavai.cz</a>

Nalezeny alternativní kódy

RIV/61389021:_____/14:00436689

Výsledek na webu

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DOI - Digital Object Identifier

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Jazyk výsledku

angličtina

Název v původním jazyce

Interaction of Extreme Ultraviolet Laser Radiation with Solid Surface: Ablation, Desorption, Nanostructuring

Popis výsledku v původním jazyce

Předneseno na:International Symposium on High Power Laser Systems and Applications/20./,Chengdu,25.-29.08.2014,Čína, The area, where interaction of focused XUV laser radiation with solid surface takes place, can be divided according to local fluency intodesorption region (if fluency is larger than zero and smaller than ablation threshold) and ablation region (if fluency is equal or larger than this threshold). It turned out that a direct nanostructuring (e.g. imprinting diffraction pattern created on edges of windows of proximity standing grid) is possible in the desorption region only. While for femtosecond pulses the particle (atom/molecule) removal-efficiency in the desorption region is very small ( < 10%), and hence, it can be easily distinguishedfrom the ablation region with 100%, for nanosecond pulses in desorption region this rises at easily ablated materials from 0% at the periphery up to 90% at the ablation contour and, therefore, the boundary between these two

Název v anglickém jazyce

Interaction of Extreme Ultraviolet Laser Radiation with Solid Surface: Ablation, Desorption, Nanostructuring

Popis výsledku anglicky

Předneseno na:International Symposium on High Power Laser Systems and Applications/20./,Chengdu,25.-29.08.2014,Čína, The area, where interaction of focused XUV laser radiation with solid surface takes place, can be divided according to local fluency intodesorption region (if fluency is larger than zero and smaller than ablation threshold) and ablation region (if fluency is equal or larger than this threshold). It turned out that a direct nanostructuring (e.g. imprinting diffraction pattern created on edges of windows of proximity standing grid) is possible in the desorption region only. While for femtosecond pulses the particle (atom/molecule) removal-efficiency in the desorption region is very small ( < 10%), and hence, it can be easily distinguishedfrom the ablation region with 100%, for nanosecond pulses in desorption region this rises at easily ablated materials from 0% at the periphery up to 90% at the ablation contour and, therefore, the boundary between these two

Druh

O - Ostatní výsledky

CEP obor

BH - Optika, masery a lasery

OECD FORD obor

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Projekt

<a href="/cs/project/GA14-29772S" target="_blank" >GA14-29772S: Nanostrukturování povrchů extrémním ultrafialovým a rentgenovým laserovým zářením</a><br>

Návaznosti

I - Institucionalni podpora na dlouhodoby koncepcni rozvoj vyzkumne organizace

Rok uplatnění

2014

Kód důvěrnosti údajů

S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů